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Volumn 43, Issue 32, 2010, Pages

Ultrasonic friction power during thermosonic Au and Cu ball bonding

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE ERRORS; BALL BONDING; BOND INTERFACE; BOND PROCESS; BONDING CAPILLARY; BONDING PROCESS; CU PROCESS; CU WIRES; EXPERIMENTAL DATA; EXPERIMENTAL MEASUREMENTS; FRICTION ENERGY; IMPROVED METHODS; INTERFACIAL FRICTION; INTERFACIAL SLIDING; MAXIMUM VALUES; MECHANICAL COMPLIANCE; OPTIMUM VALUE; PIEZO-RESISTIVE; RELATIVE AMPLITUDE; RELATIVE MOTION; SLIDING FRICTION; TANGENTIAL FORCE; THERMOSONIC BALL BONDING; THERMOSONICS; ULTRASONIC SYSTEM; VIBRATION AMPLITUDE;

EID: 77957092506     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/32/325301     Document Type: Article
Times cited : (11)

References (34)
  • 3
    • 84902569661 scopus 로고    scopus 로고
    • Zhou Y ed, Cambridge, England: Woodhead Publishing Ltd
    • Zhou Y (ed) 2008 Microjoining and Nanojoining (Cambridge, England: Woodhead Publishing Ltd)
    • (2008) Microjoining and Nanojoining
  • 4
    • 0003158611 scopus 로고
    • An Experimental model of the microelectronic ultrasonic bonding mechanisms
    • Las Vegas, NV
    • Harman G and Leedy K O 1972 An Experimental model of the microelectronic ultrasonic bonding mechanisms Proc. 10th Annual Reliability Physics Symp. (Las Vegas, NV) pp 49-56
    • (1972) Proc. 10th Annual Reliability Physics Symp. , pp. 49-56
    • Harman, G.1    Leedy, K.O.2
  • 5
    • 0017634595 scopus 로고
    • The ultrasonic welding mechanism as applied to aluminum and gold wire bonding in microelectronics IEEE Trans
    • Harman G and Albers J 1977 The ultrasonic welding mechanism as applied to aluminum and gold wire bonding in microelectronics IEEE Trans. Hybrids Packag. 13 406-12
    • (1977) Hybrids Packag , vol.13 , pp. 406-412
    • Harman, G.1    Albers, J.2
  • 6
    • 0015200210 scopus 로고
    • The formation of ultrasonic bonds between metals
    • Joshi K C 1971 The formation of ultrasonic bonds between metals Weld. J. 50 840-8
    • (1971) Weld. J. , vol.50 , pp. 840-848
    • Joshi, K.C.1
  • 7
    • 0025392201 scopus 로고
    • A transmission electron microscopy study of ultrasonic wire bonding
    • Krzanowski J E 1990 A transmission electron microscopy study of ultrasonic wire bonding IEEE Trans. Compon. Hybrids Manuf. Technol. 13 176-81
    • (1990) IEEE Trans. Compon. Hybrids Manuf. Technol. , vol.13 , pp. 176-181
    • Krzanowski, J.E.1
  • 8
    • 0015728667 scopus 로고
    • Joint formation in US welding compared with fretting phenomena for aluminium
    • Guildford, UK
    • Harthoorn J L 1973 Joint formation in US welding compared with fretting phenomena for aluminium Proc. Int. Conf. on Ultrasonics (Guildford, UK) pp 43-51
    • (1973) Proc. Int. Conf. on Ultrasonics , pp. 43-51
    • Harthoorn, J.L.1
  • 9
    • 14844289332 scopus 로고
    • The role of micro-slip in ultrasonic bonding of microelectronic dimensions
    • Chen G 1972 The role of micro-slip in ultrasonic bonding of microelectronic dimensions Proc. Int. Hybrid Microelectronics Symp.
    • (1972) Proc. Int. Hybrid Microelectronics Symp.
    • Chen, G.1
  • 10
    • 29244460989 scopus 로고    scopus 로고
    • A footprint study of bond initiation in gold wire crescent bonding
    • Zhou N, Li X and Noolu N J 2005 A footprint study of bond initiation in gold wire crescent bonding IEEE Trans. on Compon. Packag. Technol. 28 810-16
    • (2005) IEEE Trans. on Compon. Packag. Technol. , vol.28 , pp. 810-816
    • Zhou, N.1    Li, X.2    Noolu, N.J.3
  • 11
    • 21244480155 scopus 로고    scopus 로고
    • Bonding mechanism in ultrasonic gold ball bonds on copper substrate
    • Lum I, Jung J P and Zhou Y 2005 Bonding mechanism in ultrasonic gold ball bonds on copper substrate Metall. Mater. Trans. A 36A 1279-86
    • (2005) Metall. Mater. Trans. A , vol.36 A , pp. 1279-1286
    • Lum, I.1    Jung, J.P.2    Zhou, Y.3
  • 12
    • 33645572478 scopus 로고    scopus 로고
    • Footprint study of ultrasonic wedge bonding with aluminium wire on copper substrate
    • Lum I, Mayer M and Zhou Y 2006 Footprint study of ultrasonic wedge bonding with aluminium wire on copper substrate J. Electron. Mater. 35 433-42
    • (2006) J. Electron. Mater. , vol.35 , pp. 433-442
    • Lum, I.1    Mayer, M.2    Zhou, Y.3
  • 13
    • 0345771512 scopus 로고    scopus 로고
    • In situ ultrasonic stress measurements during ball bonding using integrated piezoresistive microsensors
    • Proc. InterPACK99 Conf. Dusseldorf, ASME
    • Mayer M, Schwizer J, Paul O, Bolliger D and Baltes H 1999 In situ ultrasonic stress measurements during ball bonding using integrated piezoresistive microsensors Advances in Electronic Packaging (Proc. InterPACK99 Conf.) (Dusseldorf) vol 26-1 (ASME) pp 973-8
    • (1999) Advances in Electronic Packaging , vol.1-26 , pp. 973-978
    • Mayer, M.1    Schwizer, J.2    Paul, O.3    Bolliger, D.4    Baltes, H.5
  • 15
    • 49549102428 scopus 로고    scopus 로고
    • In situ ultrasonic force signals during low-temperature thermosonic copper wire bonding
    • Shah A, Mayer M, Zhou Y, Hong S J and Moon J T 2008 In situ ultrasonic force signals during low-temperature thermosonic copper wire bonding Microelectron. Eng. 85 1851-7
    • (2008) Microelectron. Eng. , vol.85 , pp. 1851-1857
    • Shah, A.1    Mayer, M.2    Zhou, Y.3    Hong, S.J.4    Moon, J.T.5
  • 19
    • 77952862739 scopus 로고    scopus 로고
    • Ultrasonic bonding: Understanding how process parameters determine the strength of Au-Al bonds
    • Denver, CO
    • Mayer M and Schwizer J 2002 Ultrasonic bonding: understanding how process parameters determine the strength of Au-Al bonds Proc. IMAPS Int. Symp. on Microelectronics (Denver, CO)
    • (2002) Proc. IMAPS Int. Symp. on Microelectronics
    • Mayer, M.1    Schwizer, J.2
  • 22
    • 0024917506 scopus 로고
    • High impact bonding to improve reliability of VLSI die in plastic packages
    • McKenna R G and Mahle R L 1989 High impact bonding to improve reliability of VLSI die in plastic packages Proc. IEEE Electronic Components Conf. pp 424-7
    • (1989) Proc. IEEE Electronic Components Conf. , pp. 424-427
    • McKenna, R.G.1    Mahle, R.L.2
  • 24
    • 62249090214 scopus 로고    scopus 로고
    • Analysis of the friction processes in ultrasonic wedge/wedge bonding
    • Gaul H, Schneider-Ramelow M and Reichl H 2009 Analysis of the friction processes in ultrasonic wedge/wedge bonding Microsyst. Technol. 15 771-5
    • (2009) Microsyst. Technol. , vol.15 , pp. 771-775
    • Gaul, H.1    Schneider-Ramelow, M.2    Reichl, H.3
  • 25
    • 77957057776 scopus 로고    scopus 로고
    • PhD Thesis University of Waterloo, Waterloo, Ontario, Canada, Available online at
    • Shah A 2010 Mechanical and tribological aspects of microelectronic wire bonding PhD Thesis University of Waterloo, Waterloo, Ontario, Canada, pp 77-9. Available online at: http://hdl.handle.net/10012/5109
    • (2010) Mechanical and Tribological Aspects of Microelectronic Wire Bonding , pp. 77-79
    • Shah, A.1
  • 26
    • 0035472668 scopus 로고    scopus 로고
    • A microcontact approach for ultrasonic wire bonding in microelectronics
    • Jeng Y R and Horng J H 2001 A microcontact approach for ultrasonic wire bonding in microelectronics Trans. ASME, J. Tribol. 123 725-31
    • (2001) Trans. ASME, J. Tribol , vol.123 , pp. 725-731
    • Jeng, Y.R.1    Horng, J.H.2
  • 27
    • 13844305836 scopus 로고    scopus 로고
    • On the microcontact mechanism of thermosonic wire bonding in microelectronics: Saturation of interfacial phenomena
    • Jeng Y R and Chen C Y 2005 On the microcontact mechanism of thermosonic wire bonding in microelectronics: saturation of interfacial phenomena STLE Tribol. Trans. 48 127-32
    • (2005) STLE Tribol. Trans. , vol.48 , pp. 127-132
    • Jeng, Y.R.1    Chen, C.Y.2
  • 28
    • 33745634168 scopus 로고    scopus 로고
    • Effects of bonding force on contact pressure and frictional energy in wire bonding
    • Ding Y, Kim J K and Tong P 2006 Effects of bonding force on contact pressure and frictional energy in wire bonding Microelectron. Reliab. 46 1101-12
    • (2006) Microelectron. Reliab. , vol.46 , pp. 1101-1112
    • Ding, Y.1    Kim, J.K.2    Tong, P.3
  • 29
    • 0035930850 scopus 로고    scopus 로고
    • Thermosonic wire bonding of gold wire onto copper pad using the saturated interfacial phenomena
    • Jeng Y R, Aoh J N and Wang C M 2001 Thermosonic wire bonding of gold wire onto copper pad using the saturated interfacial phenomena J. Phys. D: Appl. Phys. 34 3515-21
    • (2001) J. Phys. D: Appl. Phys. , vol.34 , pp. 3515-3521
    • Jeng, Y.R.1    Aoh, J.N.2    Wang, C.M.3
  • 30
    • 0043233235 scopus 로고    scopus 로고
    • Study of interfacial phenomena affecting thermosonic wire bonding in microelectronics
    • Jeng Y R and Lin J N 2003 Study of interfacial phenomena affecting thermosonic wire bonding in microelectronics Trans. ASME, J. Tribol. 125 578-81
    • (2003) Trans. ASME, J. Tribol , vol.125 , pp. 578-581
    • Jeng, Y.R.1    Lin, J.N.2
  • 31
    • 75149147527 scopus 로고    scopus 로고
    • The ultrasonic wedge/wedge bonding process investigated using in situ real-time amplitudes from laser vibrometer and integrated force sensor
    • Gaul H, Shah A, Mayer M, Zhou Y, Schneider-Ramelow M and Reichl H 2001 The ultrasonic wedge/wedge bonding process investigated using in situ real-time amplitudes from laser vibrometer and integrated force sensor Microelectron. Eng. 87 537-42
    • (2001) Microelectron. Eng. , vol.87 , pp. 537-542
    • Gaul, H.1    Shah, A.2    Mayer, M.3    Zhou, Y.4    Schneider-Ramelow, M.5    Reichl, H.6
  • 32
    • 34249040894 scopus 로고    scopus 로고
    • Investigation of heat generation in ultrasonic metal welding using microsensor arrays
    • Cheng X and Li A 2007 Investigation of heat generation in ultrasonic metal welding using microsensor arrays J. Micromech. Microeng. 17 273-82
    • (2007) J. Micromech. Microeng , vol.17 , pp. 273-282
    • Cheng, X.1    Li, A.2
  • 33
    • 13344270633 scopus 로고
    • Contact and rubbing of flat surfaces
    • Archard J F 1953 Contact and rubbing of flat surfaces J. Appl. Phys. 24 981-8
    • (1953) J. Appl. Phys. , vol.24 , pp. 981-988
    • Archard, J.F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.