Fabrication of concave refractive microlens arrays in solgel glass by a simple proximity-effect-assisted reflow technique

Optics Letters

Volumn 29, Issue 9, 2004, Pages 1007-1009

  He, Miao ^a   Yuan, Xiaocong ^a   Bu, Jing ^a   Cheong, Wai Chye ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DNA CHIPS; MICROLENS ARRAYS (MLA); PROXIMITY-EFFECT-ASSISTED REFLOW TECHNIQUE; SURFACE SMOOTHNESS;

ATOMIC FORCE MICROSCOPY; INTERFEROMETERS; LIGHT SENSITIVE MATERIALS; MASKS; OPTICAL DESIGN; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SOL-GELS; SURFACE STRUCTURE;

MICROLENSES;

EID: 2442451740     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.29.001007     Document Type: Article

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