Electron beam evaporation of Tungsten Oxide films for gas sensors

IEEE Sensors Journal

Volumn 10, Issue 11, 2010, Pages 1796-1802

  Tesfamichael, T ^a  

^a QUEENSLAND UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Gas sensor; iron doping tungsten oxide; nanostructured thin films; noise spectroscopy

Indexed keywords

BLUE LIGHT-EMITTING; ELECTRON BEAM EVAPORATION; GAS CONCENTRATION; GAS SENSING APPLICATIONS; GAS SENSORS; IRON DOPING; IRON-DOPED; NANO-STRUCTURED; NANOSTRUCTURED THIN FILMS; NOISE SPECTROSCOPY; OPERATING TEMPERATURE; PHOTO-ACTIVATED; REPRODUCIBILITIES; ROOM TEMPERATURE; TUNGSTEN OXIDE; TUNGSTEN OXIDE FILMS;

ALDEHYDES; CHEMICAL SENSORS; DOPING (ADDITIVES); ELECTRON BEAMS; GAS DETECTORS; GAS SENSING ELECTRODES; GASES; IRON OXIDES; LIGHT EMITTING DIODES; TEMPERATURE; THIN FILMS; TUNGSTEN; TUNGSTEN COMPOUNDS; VAPOR DEPOSITION;

OXIDE FILMS;

EID: 77956707993     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2048427     Document Type: Article

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