TiO2 thin film gas sensor for monitoring ammonia

Materials Characterization

Volumn 58, Issue 8-9 SPEC. ISS., 2007, Pages 680-684

  Karunagaran, B ^a   Uthirakumar, Periyayya ^a   Chung, S J ^a   Velumani, S ^b   Suh, E K ^a  

^a Chonbuk National University   (South Korea)

^b SCHOOL OF ENGINEERING AND SCIENCES   (Mexico)

Author keywords

Ammonia sensor; Gas Sensor; Sputtering; Thin films; TiO2

Indexed keywords

AMMONIA; CHEMICAL SENSORS; MAGNETRON SPUTTERING; MOS DEVICES; POLYCRYSTALLINE MATERIALS; THIN FILMS;

AMMONIA SENSORS; CONDUCTOMETRIC GAS SENSORS; POLYCRYSTALLINE METAL-OXIDE SEMICONDUCTORS; SURFACE OXYGEN;

TITANIUM DIOXIDE;

EID: 34250738520     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2006.11.007     Document Type: Article

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