Cold Plasma Technologies for Surface Modification and Thin Film Deposition

Springer Series in Materials Science

Volumn 97, Issue , 2007, Pages 109-124

  Jama, C ^a   Delobel, R ^b  

^a Ecole Nationale Superieure de Chimie de Lille   (France)

^b CREPIM Centre de Recherche et d'Etude sur les Procedes d'Ignifugation des Materiaux   (France)

Author keywords

Cold Plasma; Cone Calorimeter; Physical Vapour Deposition; Plasma Technology; Surface Material Layer

Indexed keywords

EID: 77956650815     PISSN: 0933033X     EISSN: 21962812     Source Type: Book Series    
DOI: 10.1007/978-3-540-71920-5_6     Document Type: Chapter

References (57)

1. N. Inagaki, Plasma Surface Modification and Plasma Polymerisation. Interactions Between Plasma and Polymeric Materials (Technomic Publishing, Lancaster, 1996), Chap. 2, pp. 22–28
2. R. d’Agostino, Plasma Deposition, Treatment and Etching of Polymers (Acad-emic, New York, 1990)
3. C. Jama, O. Dessaux, P. Goudmand, J. Surf. Sci. 352–354, 490–494 (1996)
4. C. Jama, O. Dessaux, P. Goudmand, L. Gengembre, J. Grimblot, Surf. Sci. 352–354, 893–897 (1996)
5. C. Jama, O. Dessaux, P. Goudmand, L. Gengembre, J. Grimblot, J. Surf. Interf. Anal. 18(11), 751–756 (1992)
6. C. Jama, J.-D. Quensierre, L. Gengembre, V. Moineau, O. Dessaux, P. Goudmand, J. Grimblot, Surf. Interf. Anal. 27(7), 653–658 (1999)
7. O. Dessaux, P. Goudmand, C. Jama, Surf. Coat. Technol. 100–101(1–3), 38–44 (1998)
8. F. Arefi, P.M. Rahmati, V. Andre, J. Amouroux, J. Appl. Polym. Sci.: Appl. Polym. Symp. 46, 33–60 (1990)
9. P.M. Rahmati, F. Arefi, J. Amouroux, Surf. Coat. Technol. 45, 369–378 (1991)
10. A.G. Shard, J.P.S. Badyal, Polym. Commun. 32(7), 217–219 (1991)
11. A.G. Shard, J.P.S. Badyal, Macromolecules 25(7), 2053–2054 (1992)
12. O.D. Greenwood, S. Tasker, J.P.S. Badyal, J. Polym. Sci. A: Polym. Chem. 32, 2479–2486 (1994)
13. J. Hopkins, J.P.S. Badyal, J. Phys. Chem. 99(1), 4261–4264 (1995)
14. G. Akovali, Z.M. Rzaev, D.G. Mamadov, Eur. Polym. J. 32(3), 375–383 (1996)
15. J. Hopkins, S.H. Wheale, H.P.S. Badyal, J. Phys. Chem. 100, 14062–14066 (1996)
16. E. Kiss, J. Samu, A. Toth, I. Bertoti, Langmuir 12, 1651–1657 (1996)
17. S.D. Lee, M. Sarmadi, F. Denes, J.L. Shohet, Plasmas Polym. 2(3), 177–198 (1997)
18. S.D. Lee, S. Manolache, M. Sarmadi, F. Denes, Polym. Bull. 43, 409–416 (1999)
19. G. Bonizzoni, E. Vassallo, Vacuum 64(3–4), 327–336 (2002)
20. C.-K. Jung, I.-S. Bae, S.-B. Lee, J.-H. Cho, E.-S. Shin, S.-C. Choi, J.-H. Boo, Thin Solid Films 506–507, 316–322 (2006)
21. B. Mutel, C. Jama, O. Dessaux et al., Vide: Science, Technique et Applications (1995), vol. 275(Suppl.), 10th International Colloquium on Plasma Processes, 1995, pp. 126–129
22. J.A. Selamoglu, D.E. Mucha, D.A. Ibbotson, D.L. Flamm, J. Vac. Sci. Technol. B 7(6), 1345 (1989)
23. K. Ray, C.K. Maiti, S.K. Lahiri, N.B. Chakrabarti, J. Vac. Sci. Technol. B 10(3), 1139 (1992)
24. C.S. Pai, C.P. Chang, J. Appl. Phys. 68(2), 793 (1990)
25. Y. Kageyama, Y. Taga, Proceedings of 8th ISPC, Tokyo, Japan, 1987, p. 1073
26. F. Fracassi, R. d’Agostino, P. Favia, M. van Sambeck, Plasma Sources Sci. Technol. 2, 106 (1993)
27. N. Inagaki, S. Kondo, M. Hirata, H. Urushibata, J. Appl. Polym. Sci. 30, 3385 (1989)
28. T. Okuhara, J.M. White, Appl. Surf. Sci. 29, 223 (1987), Chap. 3
29. G.L. Czeremuszkin, M.R. Wertheimer, A.S. Da Silva Sobrinho, Plasmas Polym. 6(1/2), 107 (2001)
30. M. Ohring, The Materials Science of Thin Films (Academic, Boston, 1992)
31. J.A. Thornton, J.E. Greene, in Handbook of Deposition Technologies for Films and Coatings – Science, Technology and Applications, ed. by R.F. Bunshah (Noyes Publications, Park Ridge, NJ, 1994), p. 55
32. E.M. Liston, L. Martinu, M.R. Wertheimer, J. Adhes, Sci. Technol. 7(10), 1091 (1993)
33. H. Chatham, Surf. Coat. Technol. 78(1–3), 1 (1996)
34. Y. Leterrier, Prog. Mater. Sci. 48(1), 1 (2003)
35. A. Gruniger, Ph. Rudolf von Rohr, Surf. Coat. Technol. 174, 1043 (2003)
36. A. Sugimoto et al., IEEE J. Sel. Top. Quant. Electron. 10(1), 107 (2004)
37. R. Lamendola, R. d’Agostino, Pure Appl. Chem. 70(6), 1203–1208 (1998)
38. L.B. Ryder, Plast. Eng. 41 (1994)
39. J.T. Felts, A.D. Grubb, J. Vac. Sci. Technol. A 10, 1675 (1992)
40. M. Walther, M. Heming, M. Spallek, Surf. Coat. Technol. 80, 200 (1996)
41. L. Agres, Y. Segui, R. Delsol, P. Raynaud, J. Appl. Polym. Sci. 61, 2015 (1996)
42. J.E. Klemberg-Sapiepha, L. Martinu, O.M. Kuttel, M. Wertheimer, Proceedings of 36th Society of Vacuum Coaters Annual Conference, SVC, 1993, p. 445
43. M. Izu, B. Dotter, S.R. Ovshinski, Proceedings of 36th Society of Vacuum Coaters Annual Conference, SVC, 1993, p. 333
44. A.G. Erlat, R.J. Spontak et al., J. Phys. Chem. B 103, 6047 (1999)
45. N. Inagaki, S. Tasaka, H. Hiramatsu, J. Appl. Polym. Sci. 71, 2091 (1999)
46. C. Jama, K. Asfardjani, O. Dessaux, P. Goudmand, J. Appl. Polym. Sci. 64(4), 699–705 (1997)
47. A. Quédé, B. Mutel, P. Supiot, C. Jama, O. Dessaux, R. Delobel, Surf. Coat. Technol. 180–181, 265–270 (2004)
48. A. Quede, J. Cardoso et al., J. Mater. Sci. 37(7), 1395–1399 (2002)
49. A. Quédé, C. Jama, P. Supiot, M. Le Bras, R. Delobel, O. Dessaux, P. Goudmand, Surf. Coat. Technol. 151–152, 424–428 (2002)
50. I. Errifai, C. Jama, M. Le Bras, R. Delobel, L. Gengembre, A. Mazzah, R. De Jaeger, Surf. Coat. Technol. 180–181, 297–301 (2004)
51. Standard test method for measuring the minimum oxygen concentration to support candle-like combustion of plastics (Oxygen Index), ASTM D 2863/77 (1977), Philadelphia
52. Standard test method for heat and visible smoke release for materials and products using an oxygen depletion calorimeter, ASTM E 1354-90a (1990), Philadelphia
53. L.L. Tedder, G. Lu, J.E. Crowel, J. Appl. Phys. 69, 7073 (1991)
54. D.R. Anderson, Analysis of Silicones. Infrared, Raman and Ultraviolet Spectroscopy (Wiley, New York, 1974), Chap. 10, p. 247
55. C. Rau, W. Kulisch, Thin Solid Films 249, 28 (1997)
56. F. Callebert, P. Supiot, K. Asfardjani, O. Dessaux, P. Goudmand, P. Dhamelincourt, J. Laureyns, J. Appl. Polym. Sci. 52, 1595 (1994)
57. P.G. Pai, S.S. Chao, Y. Takagi, G. Lucovsky, J. Vac. Sci. Technol. A 4, 689 (1986)