SCOPUS 정보 검색 플랫폼

Surface Science

Volumn 352-354, Issue , 1996, Pages 893-897

Ageing of an organosiloxane deposit in a cold remote nitrogen plasma: XPS investigation

(5) Jama, C a Dessaux, O a Goudmand, P a Gengembre, L b Grimblot, J b

a UNIV LILLE (France)

b UNITÉ DE CATALYSE ET DE CHIMIE DU SOLIDE (France)

Author keywords

Organosilicon; Scanning electron microscopy; X ray photoelectron spectroscopy

Indexed keywords

AGING OF MATERIALS; CHEMICAL BONDS; DEPOSITION; ETCHING; MIXTURES; MORPHOLOGY; NITROGEN; OXIDES; PLASMA APPLICATIONS; SILICONES; SURFACE STRUCTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

COLD REMOTE NITROGEN PLASMA; ORGANOSILOXANE DEPOSIT; SURFACE COMPOSITION CHANGE; THIN POLYMERIC FILMS;

PLASTIC FILMS;

EID: 0030147855 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/0039-6028(95)01293-1 Document Type: Article

Times cited : (3)

References (15)

1
- 0004201645
- Academic Press, New York
- H. Yasuda, Plasma Polymerization (Academic Press, New York, 1985).
- (1985) Plasma Polymerization
- Yasuda, H.¹

2
- 0027666896
- P. Supiot, F. Callebert, O. Dessaux and P. Goudmand, Plasma Chem. Plasma Proc. 13 (1993) 539.
- (1993) Plasma Chem. Plasma Proc. , vol.13 , pp. 539
- Supiot, P.¹ Callebert, F.² Dessaux, O.³ Goudmand, P.⁴

3
- 0028452717
- F. Callebert, P. Supiot, O. Dessaux and P. Goudmand, J. Appl. Polym. Sci. 52 (1994) 1595.
- (1994) J. Appl. Polym. Sci. , vol.52 , pp. 1595
- Callebert, F.¹ Supiot, P.² Dessaux, O.³ Goudmand, P.⁴

4
- 30244517556
- 4th TAFT, Dresden, DGM ed.
- C. Jama, F. Callebert, O. Dessaux and P. Goudmand, Cold Remote Nitrogen Plasma: A New Trend For Thin Organosilicon Deposition, 4th TAFT, Dresden, DGM ed. (1994) 167.
- (1994) Cold Remote Nitrogen Plasma: A New Trend For Thin Organosilicon Deposition , pp. 167
- Jama, C.¹ Callebert, F.² Dessaux, O.³ Goudmand, P.⁴

5
- 30244553999
- Aachen
- P. Supiot, O. Dessaux and P. Goudmand, 3rd Eur. Cong. on Thermal Plasma Processes, Aachen (1994) 533.
- (1994) 3rd Eur. Cong. on Thermal Plasma Processes , pp. 533
- Supiot, P.¹ Dessaux, O.² Goudmand, P.³

6
- 0041544823
- A. Van Eenbergen and E. Brunninx, J. Electron Spectrosc. Relat. Phenom. 33 (1984) 51.
- (1984) J. Electron Spectrosc. Relat. Phenom. , vol.33 , pp. 51
- Van Eenbergen, A.¹ Brunninx, E.²

7
- 0041742046
- J.H. Scofield, J. Electron Spectrosc. Relat. Phenom. 8 (1976) 129.
- (1976) J. Electron Spectrosc. Relat. Phenom. , vol.8 , pp. 129
- Scofield, J.H.¹

8
- 0028387002
- S. Tanuma, C.J. Powel and D.R. Penn, Surf. Interface Anal. 21 (1994) 165.
- (1994) Surf. Interface Anal. , vol.21 , pp. 165
- Tanuma, S.¹ Powel, C.J.² Penn, D.R.³

9
- 0024036994
- H. Ebel, M.F. Ebel and H. Krocza, Surf. Interface Anal. 12 (1988) 137.
- (1988) Surf. Interface Anal. , vol.12 , pp. 137
- Ebel, H.¹ Ebel, M.F.² Krocza, H.³

10
- 0022695074
- R.K. Brow and C.G. Pantano, J. Am. Ceram. Soc. 69 (1986) 314.
- (1986) J. Am. Ceram. Soc. , vol.69 , pp. 314
- Brow, R.K.¹ Pantano, C.G.²

11
- 0023326540
- M.S. Donley, D.R. Baer and T.G. Stoebe, Surf. Interface Anal. 11 (1988) 335.
- (1988) Surf. Interface Anal. , vol.11 , pp. 335
- Donley, M.S.¹ Baer, D.R.² Stoebe, T.G.³

12
- 0023842473
- K.M.R. Kallury, U.J. Krull and M. Thompson, Anal. Chem. 60 (1988) 169.
- (1988) Anal. Chem. , vol.60 , pp. 169
- Kallury, K.M.R.¹ Krull, U.J.² Thompson, M.³

13
- 0022137094
- M.L. Miller and R.W. Linton, Anal. Chem. 57 (1985) 2314.
- (1985) Anal. Chem. , vol.57 , pp. 2314
- Miller, M.L.¹ Linton, R.W.²

14
- 0027591863
- C. Jones, Surf. Interface Anal. 20 (1993) 357; S.L. Kaplan, E.S. Lapota and J. Smith, Surf. Interface Anal. 20 (1993) 331.
- (1993) Surf. Interface Anal. , vol.20 , pp. 357
- Jones, C.¹

15
- 0027591194
- C. Jones, Surf. Interface Anal. 20 (1993) 357; S.L. Kaplan, E.S. Lapota and J. Smith, Surf. Interface Anal. 20 (1993) 331.
- (1993) Surf. Interface Anal. , vol.20 , pp. 331
- Kaplan, S.L.¹ Lapota, E.S.² Smith, J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.