Preparation of Oxygen Gas Barrier Poly(ethylene terephthalate) Films by Deposition of Silicon Oxide Films Plasma-Polymerized from a Mixture of Tetramethoxysilane and Oxygen

Journal of Applied Polymer Science

Volumn 71, Issue 12, 1999, Pages 2091-2100

  Inagaki, N ^a   Tasaka, S ^a   Hiramatsu, H ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Oxygen gas barrier; Poly(ethylene terephthalate); Silicon oxide films; Tetramethoxysilane

Indexed keywords

DEPOSITION; ELECTRODES; ETCHING; MECHANICAL PERMEABILITY; OXYGEN; PLASMA POLYMERIZATION; POLYETHYLENE TEREPHTHALATES; SILANES; SYNTHESIS (CHEMICAL);

OXYGEN GAS BARRIERS; SILICON OXIDE; TETRAMETHOXYSILANE;

PLASTIC FILMS;

EID: 0033101539     PISSN: 00218995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1097-4628(19990321)71:12<2091::aid-app20>3.0.co;2-a     Document Type: Article

References (7)

1. Inagaki, N. In Jikken Kagaku Koza 29, Kobunshi Zairyo (in Japanese); The Chemical Society of Japan: Maruzen, Tokyo, 1993; Chapter 10.4, p 477.
2. Adams, A. C. VLSI Technology; Sze, S. M., Ed.; McGraw-Hill: New York, 1988; p 233.
3. Chapman, B. Glow Discharge Process; Wiley: New York, 1980; p 143.
4. Yamada, K. In Low Temperature Plasma for Material Chemistry; Osada, Y., Ed.; Sangyo Tosho: Tokyo, 1994; Chapter 3, p 41.
5. Rogers, C. E. In Polymers, Polymer Permeability; Comyn, J., Ed.; Elsevier: London, 1985; Chapter 2, p 11.
6. Beamson, G.; Briggs, D. High Resolution XPS of Organic Polymers; Wiley: New York, 1992.
7. Ashley, R. J. In Polymer Permeability; Comyn, J., Ed.; Elsevier: London, 1985; Chapter 7, p 269.