Fabrication and frequency response of solidly mounted resonators with 1/4λ mode configuration

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5277-5281

  Chung, Chung Jen ^a   Chen, Ying Chung ^a   Cheng, Chien Chuan ^b   Kao, Kuo Sheng ^c  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b DE LIN INSTITUTE OF TECHNOLOGY   (Taiwan)

^c SHU TE UNIVERSITY   (Taiwan)

Author keywords

1 4 mode; Aluminum nitride; Bragg reflector; Solidly mounted resonators

Indexed keywords

ACOUSTIC IMPEDANCE; ALUMINUM COMPOUNDS; BRAGG REFLECTORS; ENERGY DISSIPATION; FREQUENCY RESPONSE; STANDING WAVE METERS;

ALUMINUM NITRIDES; COUPLING COEFFICIENTS; MULTILAYERED STRUCTURES; SOLIDLY MOUNTED RESONATORS;

RESONATORS;

EID: 43949106863     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.050     Document Type: Article

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