Influence of surface migration on the spatial resolution of pulsed laser atom probe tomography

Journal of Applied Physics

Volumn 108, Issue 4, 2010, Pages

  Gault, B ^a   Muller M ^a   La Fontaine, A ^b   Moody, M P ^b   Shariq, A ^c   Cerezo, A ^a   Ringer, S P ^b   Smith, G D W ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b UNIVERSITY OF SYDNEY   (Australia)

^c Fraunhofer Center Nanoelectronic Technologies   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM PROBE TOMOGRAPHY; FIELD EVAPORATION; IN-DEPTH RESOLUTION; LASER PULSING; LATERAL RESOLUTION; PEAK TEMPERATURES; PULSED LASER; QUANTITATIVE ANALYSIS; SPATIAL RESOLUTION; SPECIMEN TEMPERATURE; SURFACE MIGRATION;

IMAGE RESOLUTION; LIGHT ABSORPTION; PROBES; PULSED LASER APPLICATIONS; TOMOGRAPHY;

PULSED LASERS;

EID: 77956337395     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3462399     Document Type: Conference Paper

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