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Volumn 95, Issue 3, 2009, Pages

Origin of the spatial resolution in atom probe microscopy

(6) Gault, Baptiste a,b Moody, Michael P a De Geuser, Frederic c Haley, Daniel a Stephenson, Leigh T a Ringer, Simon P a

a UNIVERSITY OF SYDNEY (Australia)

b UNIVERSITY OF OXFORD (United Kingdom)

c GRENOBLE INSTITUTE OF TECHNOLOGY (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM PROBE; COMPREHENSIVE STUDIES; KEY PARAMETERS; LATERAL RESOLUTION; PROBE MICROSCOPY; SPATIAL RESOLUTION; SUBNANOMETER; THREE DIMENSIONS; UNCERTAIN PARAMETERS;

ATOMS; IMAGE RESOLUTION; PROBES;

UNCERTAINTY ANALYSIS;

EID: 67651241612 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3182351 Document Type: Article

Times cited : (83)

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