Parameter extraction for tunable TFBARs based on BaxSr 1-xTiO3

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2009, Pages 101-104

  Norling, Martin ^a   Berge, John ^a   Gevorgian, Spartak ^a,b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Ericsson Microwave Systems AB   (Sweden)

Author keywords

Model extraction; Piezoelectric, ferroelectric; Tunable TFBAR; Tunable thin film bulk acoustic resonator

Indexed keywords

EXTRACTION PROCEDURE; MODEL EXTRACTION; MODEL PARAMETERS; TIO;

BARIUM; CRYSTALLOGRAPHY; FERROELECTRICITY; INSULATING MATERIALS; MICROWAVES; PARAMETER EXTRACTION; PIEZOELECTRICITY; RESONATORS; THIN FILM DEVICES;

ACOUSTIC RESONATORS;

EID: 77950003828     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2009.5165642     Document Type: Conference Paper

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