Cluster SIMS depth profiling of stereo-specific PMMA thin films on Si

Surface and Interface Analysis

Volumn 42, Issue 8, 2010, Pages 1393-1401

  Mahoney, Christine M ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Cluster; PMMA; Polymer; SIMS; Stereochemistry; Tacticity

Indexed keywords

ATACTIC; CHAIN SCISSION; CHARACTERISTIC SIGNAL; CLUSTER; CLUSTER SIMS; DAMAGE ACCUMULATION; DEPTH PROFILE; GLASS TRANSITION TEMPERATURE; HIGHER TEMPERATURES; INTERFACIAL DAMAGES; ISOTACTICS; PMMA; PMMA FILMS; PMMA THIN FILM; POLYATOMICS; SIDE-CHAIN; SIMS; SPUTTER SOURCES; STEREOSPECIFIC; STERIC HINDRANCES; SYNDIOTACTICS; TACTICITIES; TEMPERATURE RANGE;

DEPTH PROFILING; POLYMERS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING SILICON COMPOUNDS; STEREOCHEMISTRY; THIN FILMS;

GLASS TRANSITION;

EID: 77956137952     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3115     Document Type: Article

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