A simple erosion dynamics model of molecular sputter depth profiling

Surface and Interface Analysis

Volumn 40, Issue 12, 2008, Pages 1545-1551

  Wucher, Andreas ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Cluster SIMS; Erosion dynamics; Molecular depth profiling

Indexed keywords

DYNAMICS; EROSION; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; IONS; MASS SPECTROMETERS; MASS SPECTROMETRY; SECONDARY ION MASS SPECTROMETRY; SOIL MECHANICS; SPECTROMETRY;

CLUSTER SIMS; EROSION DYNAMICS; ESSENTIAL FEATURES; EXPERIMENTAL DATUMS; MOLECULAR DEPTH PROFILES; MOLECULAR DEPTH PROFILING; MOLECULAR IONS; OVERLAYERS; PRIMARY IONS; SECONDARY NEUTRAL MASS SPECTROMETRIES; SIMPLE MODELS; SPECTROMETRIC TECHNIQUES; SPUTTER DEPTHS;

DEPTH PROFILING;

EID: 56749180193     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2933     Document Type: Article

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