C 60 sputtering of organics: A study using TOF-SIMS, XPS and nanoindentation

Applied Surface Science

Volumn 255, Issue 4, 2008, Pages 819-823

  Fisher, Gregory L ^a   Dickinson, Michelle ^b   Bryan, Scott R ^a   Moulder, John ^a  

^a Physical Electronics Inc Minnesota   (United States)

^b Bruker Corporation   (United States)

Author keywords

C 60; Poly(methyl methacrylate) (PMMA); Polymer; TOF SIMS

Indexed keywords

ESTERS; ION BEAMS; IONS; KINETIC ENERGY; KINETICS; POLYMERS; SECONDARY ION MASS SPECTROMETRY;

ACCUMULATED DAMAGE; CARBON ACCUMULATION; ION KINETIC ENERGY; ORGANIC MATERIALS; POLY(METHYL METHACRYLATE) (PMMA); SECONDARY ION YIELD; SIGNAL DEGRADATION; TOF SIMS;

SPUTTERING;

EID: 56449110241     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.182     Document Type: Article

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