Power dissipation and mode transition in an RF discharge with multi-hollow cathode electrode

Thin Solid Films

Volumn 518, Issue 22, 2010, Pages 6682-6685

  Lee, Yun Seong ^a   Lee, Hun Su ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Hollow cathode discharge; PECVD; RF discharge; Thin film

Indexed keywords

CATHODE ELECTRODES; DISCHARGE CONDITIONS; DISCHARGE PARAMETERS; ELECTRICAL CHARACTERISTIC; ELECTRON DENSITIES; GAS PRESSURES; HOLE DIAMETER; HOLLOW CATHODE DISCHARGE; HOLLOW CATHODES; MODE TRANSITIONS; PECVD; PLASMA PARAMETER; POWER DISSIPATION; PRESSURE RANGES; RF CAPACITIVELY COUPLED PLASMA; RF CURRENTS; RF DISCHARGE; RF-POWER;

CARRIER CONCENTRATION; ELECTRON DENSITY MEASUREMENT; ELECTRON TEMPERATURE; KRYPTON; NEON; PROBES; THIN FILMS;

ELECTRIC DISCHARGES;

EID: 77956061118     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.02.057     Document Type: Conference Paper

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