Characterisation of nanolayered aluminium/palladium thin films using nanoindentation

Thin Solid Films

Volumn 517, Issue 13, 2009, Pages 3698-3703

  Dayal, P ^a   Savvides, N ^b   Hoffman, M ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b CSIRO   (Australia)

Author keywords

Al Pd multilayer; Elastic modulus; Hardness; Nanoindentation; Transmission electron microscopy

Indexed keywords

AL FILMS; AL/PD MULTILAYER; BILAYER THICKNESS; CHARACTERISATION; HARDNESS ENHANCEMENTS; LAYER THICKNESS; MAXIMUM HARDNESS; TEM;

ALUMINUM; ELASTIC MODULI; ELECTRON MICROSCOPES; FILM PREPARATION; HARDNESS; METALLIC FILMS; MULTILAYERS; NANOINDENTATION; PALLADIUM;

TRANSMISSION ELECTRON MICROSCOPY;

EID: 64349094209     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.01.174     Document Type: Article

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