DMCMN: Experimental/analytical evaluation of the effect of tip mass on atomic force microscope cantilever calibration

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 131, Issue 6, 2009, Pages 1-10

  Allen, Matthew S ^a   Sumali, Hartono ^b   Penegor, Peter C ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AFM CANTILEVERS; AFM PROBE; AREA DENSITY; ATOMIC FORCE MICROSCOPE CANTILEVERS; ATOMIC FORCE MICROSCOPES; CONTACT-MODE AFM; CROSS SECTION; DYNAMIC CALIBRATION; EULER BERNOULLI BEAMS; FUNDAMENTAL MODES; LASER DOPPLER VIBROMETRY; MICRO-SCALES; MODE SHAPES; MODIFIED METHODS; NONUNIFORM; PROBE TIPS; Q-FACTORS; QUANTITATIVE STUDY; SPRING CONSTANTS; STATIC STIFFNESS; THICKNESS UNIFORMITY; TIP MASS;

ATOMIC FORCE MICROSCOPY; ATOMS; CALIBRATION; CANTILEVER BEAMS; ERROR ANALYSIS; LASER DOPPLER VELOCIMETERS; MICROSCOPES; NANOCANTILEVERS; NATURAL FREQUENCIES; SCANNING ELECTRON MICROSCOPY; STIFFNESS; VIBRATION MEASUREMENT;

PROBES;

EID: 77955949860     PISSN: 00220434     EISSN: 15289028     Source Type: Journal    
DOI: 10.1115/1.4000160     Document Type: Article

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