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Volumn 108, Issue 2, 2010, Pages

Effects of deposition temperature on the effectiveness of hydrogen doping in Ga-doped ZnO thin films

Author keywords

[No Author keywords available]

Indexed keywords

BENEFICIAL EFFECTS; DC MAGNETRON SPUTTERING; DEPOSITION TEMPERATURES; DOPED ZINC OXIDE THIN FILMS; ELECTRICAL PROPERTY; ELECTRICAL TRANSPORT PROPERTIES; FREE CARRIER ABSORPTION; GA-DOPED ZNO; GLASS SUBSTRATES; HIGH TEMPERATURE; HYDROGEN ATOMS; HYDROGEN CONTENTS; HYDROGEN DOPING; HYDROGEN GAS; HYDROGEN INCORPORATION; INTERSTITIAL HYDROGEN; LATTICE EXPANSION; LOW RESISTIVITY; NEAR-INFRARED RANGE; SHALLOW DONORS; STRUCTURAL AND OPTICAL PROPERTIES; THERMAL STABILITY; VACUUM-ANNEALING;

EID: 77955831682     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3456527     Document Type: Article
Times cited : (39)

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