Effects of hydrogen content in sputtering ambient on ZnO:Al electrical properties

Journal of Non-Crystalline Solids

Volumn 354, Issue 19-25, 2008, Pages 2787-2790

  Duenow, Joel N ^a   Gessert, Timothy A ^b   Wood, David M ^a   Young, David L ^b   Coutts, Timothy J ^b  

^a Department of Geology and Geological Engineering   (United States)

^b NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

II VI semiconductors; Indium tin oxide and other transparent conductors; Sputtering

Indexed keywords

CONDUCTIVE FILMS; DOPING (ADDITIVES); INDIUM COMPOUNDS; MAGNETRON SPUTTERING; PHONON SCATTERING; ZINC OXIDE;

ACOUSTIC PHONON SCATTERING; II-VI SEMICONDUCTORS; INDIUM TIN OXIDE; TRANSPARENT CONDUCTORS;

THIN FILMS;

EID: 42649103002     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.10.070     Document Type: Article

References (9)

1. Lewis B.G., and Paine D.C. MRS Bull. 25 (2000) 22
2. Coutts T.J., Young D.L., and Li X. MRS Bull. 25 (2000) 58
3. Minami T. Semicond. Sci. Technol. 20 (2005) S35
4. Szyszka B. Thin Solid Films 351 (1999) 164
5. Ellmer K. J. Phys. D 34 (2001) 3097
6. Yoshida Y., Wood D.M., Gessert T.A., and Coutts T.J. Appl. Phys. Lett. 84 (2004) 2097
7. Selvan J.A.A., Delahoy A.E., Guo S., and Li Y.-M. Solar Energ. Mat. Sol. Cells 90 (2006) 3371
8. Duenow J.N., Gessert T.A., Wood D.M., Barnes T.M., Young M., To B., and Coutts T.J. J. Vac. Sci. Technol. A 25 (2007) 955
9. Makino T., Segawa Y., Yoshida S., Tsukazaki A., Ohtomo A., and Kawasaki M. Appl. Phys. Lett. 85 (2004) 759