Integrated silicon-PDMS process for microrobot mechanisms

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2010, Pages 3153-3158

  Gerratt, Aaron P ^a   Penskiy, Ivan ^a   Bergbreiter, Sarah ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FEATURE SIZES; IN-PLANE; MEMS PROCESS; MICRO ROBOTS; OUT-OF PLANE; POLYDIMETHYLSILOXANE PDMS; SILICON ON INSULATOR WAFERS; SILICON STRUCTURES; SOFT ELASTOMERS; TEST STRUCTURE; YOUNG'S MODULUS;

DATA COMMUNICATION EQUIPMENT; MICROCHANNELS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

ROBOTICS;

EID: 77955791265     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2010.5509653     Document Type: Conference Paper

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