Elastomer-based micromechanical energy storage system

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2006, Pages

  Bergbreiter, Sarah ^a   Pister, Kristofer S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; ENERGY EFFICIENCY; MEMS; MICROMECHANICS; SILICON ON INSULATOR TECHNOLOGY; SILICONES;

ELECTROSTATIC INCHWORM MOTOR; MICRO RUBBER BANDS; MICROMECHANICAL ENERGY STORAGE; TWO-MASK SILICON-ON-INSULATOR;

ENERGY STORAGE;

EID: 85196531297     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2006-14919     Document Type: Conference Paper

References (9)

1. M. S. Rodgers, J. J. Allen, K. D. Meeks, B. D. Jensen, and S. L. Miller, "A microelectromechanical high-density energy storage/rapid release system," SPIE, v. 3876, 1999, pp. 212-222.
2. M. S. Rodgers, J. J. Allen, K. D. Meeks, B. D. Jensen, and S. L. Miller, "A microelectromechanical high-density energy storage/rapid release system," SPIE, v. 3876, 1999, pp. 212-222.
3. R. Yeh, S. Hollar, and K. S. J. Pister. "Single mask, large force, and large displacement electrostatic linear inchworm motors," JMEMS, v.11, n.4, Aug. 2002, pp.330-336.
4. J. C. Lotters, J. G. Bomer, A. J. Verloop, E. A. Droog, W. Olthuis, P. H. Veltink, and P. Bergveld, "Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer," Sensors & Actuators A-Physical, vol. 66, pp. 205-212, 1998.
5. Yi-Chung Tung and K. Kurabayashi. "A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities-part II: fabrication and characterization." JMEMS, v.14, n.3, June 2005, pp.558-566.
6. R. Pelrine, R. Kornbluh, J. Joseph, R. Heydt, Q. Pei, and S. Chiba. "High-field deformation of elastomeric dielectrics for actuators." Materials Science & Engineering C, Biomimetic and Supramolecular Systems, v.C11, n.2, Nov. 2000, pp.89-100.
7. J. X. Gao, L. P. Yeo, M. B. Chan-Park, J. M. Miao, Y. H. Yan, J. B. Sun, Y. C. Lam, and C. Y. Yue. "Antistick postpassivation of high-aspect ratio silicon molds fabricated by deep-reactive ion etching." JMEMS, v.15, n.1, February 2006, pp.84-93.
8. M. Last. "Pick and Place Silicon on Insulator Microassembly," Electrical Engineering and Computer Science, University of California Berkeley, 2005.
9. V. Subramaniam, M. E. Last, and K. S. J. Pister. "Methods and Characterization of Pick and Place Microassembly," presented at International Mechanical Engineering Congress and Exposition, Chicago, IL, 2006.