Composition and bonding structure of nanostructured carbon nitride films and their influences on the electrical properties

Electronic Materials Letters

Volumn 5, Issue 1, 2009, Pages 1-6

  Lee, Sung Pil ^a  

^a Kyungnam University   (South Korea)

Author keywords

Bonding structure; Carbon nitride film; Composition; Facing targets; Sputtering system

Indexed keywords

BONDING STRUCTURE; CARBON NITRIDE FILM; CARBON NITRIDE FILMS; CHEMICAL FORMULAE; COMPOSITION; ELECTRICAL PROPERTY; ENERGETIC ELECTRON; GRAIN SIZE; HIGH RESISTIVITY; INSULATING FILM; LOW DIELECTRIC CONSTANTS; NANOSTRUCTURED CARBONS; PLASMA DISCHARGE; RF-SPUTTERING; SPUTTERING SYSTEM; XPS ANALYSIS;

CARBON FILMS; ELECTRIC DISCHARGES; ELECTRIC PROPERTIES; FACINGS;

CARBON NITRIDE;

EID: 77955755109     PISSN: 17388090     EISSN: None     Source Type: Journal    
DOI: 10.3365/eml.2009.03.001     Document Type: Article

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