Effect of hydrogen on carbon nitride film deposition

Journal of the Korean Physical Society

Volumn 39, Issue SUPPL. Part 1, 2001, Pages

  Lee, Sung Pil ^a   Kang, Jong Bong ^a   Chowdhury, Shaestagir ^b  

^a Kyungnam University   (South Korea)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035542235     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. J. A. Thornton, Thin Solid Films 171, 5 (1989).
2. K. L. Chopra, Thin Film Phenomema, M-H, New York (1969).
3. H. J. Bae, C. M. Lee, S. K. Hwang and S. W. Choi, J. Korean Phys. Soc. 33, 689 (1998).
4. W. C. Choi, C. K. Klm, E. K. Kim, C. M. Shim, D. Jung and C. Y. Park, J. Korean Phys. Soc. 36, 23 (2000).
5. S. Hong, J. Korean Phys. Soc. 37, 93 (2000).
6. T. Sato, S. Furuno, S. Iguchi and M. Hanabusa, Appl. Phys. A, 45, 355 (1988).
7. S. P. Lee and S. Chowdhury, J. Korean Sensors Soc. 9, 3 (2000).
8. B. C. Holloway, D. K. Shuh, M. A. Kelly, W. Tong, J. A. Carlisle, I. Jimenesz, D. G. J. Sutherl L. J. Terminello, P. Pianette and S. Hangstrong, Thin Solid Films 94-98, 290 (1996).
9. D. Briggs and M. P. Seah, Practical Surface Analysis (John Wiley & Sons, New York, 1996), Vol. 1.
10. V. V. Nemoshkalenko, V. G. Aleshin and Y. Kucherenko, Solid State Comm. 20, 1155 (1976).
11. J. Seth, R. Padiyath and S. V. Babu, Diamond and Related Materials 3, 210 (1994).
12. H. J. Schotzau and S. Veprek, Appl. Phys. 7, 27 (1975).