Mechanical properties of phase-change recording media: GeSbTe films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 5 A, 2001, Pages 3320-3325

  Jong, Chao An ^a   Fang, Weileung ^a   Lee, Chain Ming ^a   Chin, Tsung Shune ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Coefficient of thermal expansion; Elastic modulus; GeSbTe films; Hardness; Mechanical properties of thin films; Phase change recording media; Residual stress

Indexed keywords

CANTILEVER BEAMS; COMPOSITION EFFECTS; CRYSTAL LATTICES; ELASTIC MODULI; FILM PREPARATION; HARDNESS; INDENTATION; RESIDUAL STRESSES; STRESS RELAXATION; THERMAL EXPANSION; THICKNESS MEASUREMENT;

CANTILEVER BEAM METHODS; COEFFICIENT OF THERMAL EXPANSION (CTE);

THIN FILMS;

EID: 0035328435     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.3320     Document Type: Article

References (7)