Three-dimensional shape measurement of micro-lens arrays using full-field swept-source optical coherence tomography

Optics and Lasers in Engineering

Volumn 48, Issue 11, 2010, Pages 1145-1151

  Anna, Tulsi ^a   Shakher, Chandra ^a   Mehta, Dalip Singh ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Full field optical coherence tomography; Micro lenses; Three D surface profilometry

Indexed keywords

ACOUSTO-OPTIC TUNABLE FILTERS; AREA DETECTORS; CONTROLLED FREQUENCY; CYLINDRICAL LENS; FOURIER-FILTERING; FULL-FIELD; INTERFERENCE FRINGE; INTERFEROGRAMS; LOW-COHERENCE; MECHANICAL SCANNING; MICRO LENS; MICRO-LENS ARRAYS; OPTICAL ARRANGEMENT; OPTICAL COHERENCE TOMOGRAPHY; OPTICAL COHERENCES; OPTICAL PATH; PHASE MAPS; SUPERLUMINESCENT DIODE; SURFACE PROFILES; SURFACE PROFILOMETRY; SWEPT SOURCE; THREE-DIMENSIONAL (3D) SHAPE MEASUREMENT; THREE-DIMENSIONAL SHAPE MEASUREMENT; TOMOGRAPHIC;

COHERENT LIGHT; LIGHT SOURCES; MICHELSON INTERFEROMETERS; MICROLENSES; OPTICAL INSTRUMENTS; PROFILOMETRY; TOMOGRAPHY;

THREE DIMENSIONAL;

EID: 77955545213     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2010.03.002     Document Type: Article

References (42)

1. T. Miyashita Standardization for microlenses and microlens arrays J Appl Phys 46 2007 5391 5396
2. C. Quan, S.H. Wang, C.J. Tay, I. Reading, and Z.P. Fang Integrated optical inspection on surface geometry and refractive index distribution of a microlens array Opt Commun 225 2003 223 231
3. P. Nussbaum, R. Volkel, H.P. Herzig, M. Eisner, and S. Haselbeck Design, fabrication and testing of microlens arrays for sensors and microsystems Pure Appl Opt 6 1997 617 636
4. H. Ottevaere, B. Volckaerts, J. Lamprecht, J. Schwider, A. Hermanne, and I. Veretennicoff Two-dimensional plastic microlens arrays by deep lithography with protons: fabrication and characterization J Opt A: Pure Appl Opt 4 2002 S22 S28
5. J. Bahr, K.H. Brenner, T. Singer, S. Sinzinger, and M. Testorf Index-distributed planar microlenses for three-dimensional micro-optics fabricated by silver-sodium ion exchange in BGG35 substrates Appl Opt 33 1994 5919 5924
6. L. Yulin, L. Tonghai, J. Guohua, H. Baowen, H. Junmin, and W. Lili Research on micro-optical lenses fabrication technology Optik 118 2007 395 401
7. D. Daly, R.F. Stevens, M.C. Hutley, and N. Davies The manufacture of microlenses by melting photoresist J Meas Sci Technol 1 1990 759 766
8. S. Haselbeck, H. Schreiber, J. Schwider, and N. Streibl Microlenses fabricated by melting photoresist Opt Eng 6 1993 1322 1324
9. T.R. Jay Preshaping photoresist for refractive microlens fabrication Opt Eng 33 1994 3552 3555
10. C. Croutxe-Barghorn Fabrication of refractive microlens arrays by visible irradiation of acrylic monomers: influence of photonic parameters Eur Phys J: Appl Phys 13 2001 31 37
11. V. Sturm, G. Treusch H, and P. Loosen Cylindrical microlenses for collimating high-power diode lasers Proc SPIE 3097 1997 717 726
12. J.B. Orhan, V.K. Parashar, A. Sayah, and M.A.M. Gijs Fabrication and characterization of three-dimensional microlens arrays in solgel glass Microelectron Eng 83 2006 1329 1332
13. H.J. Tiziani, T. Haist, and S. Reuter Optical inspection and characterization of micro-optics using confocal microscopy Opt Lasers Eng 36 2001 403 415
14. P. Yongwoo, H.S. Nak, Y. Youngchun, and Y.K. Dug Simple scanning fiber-optic confocal microscopy for the refractive index profile measurement of an optical fiber Meas Sci Technol 13 2002 695 699
15. W. Moench, and H. Zappe Fabrication and testing of micro-lens arrays by all-liquid techniques J Opt A: Pure Appl Opt 6 2004 330 337
16. J. Schwider, and O. Falkenstorfer TwymanGreen interferometer for testing microspheres Opt Eng 34 1995 2972 2975
17. S. Reichelt, and H. Zappe Combined TwymanGreen and MachZehnder interferometer for microlens testing Appl Opt 44 2005 5786 5792
18. Wang SH, Reading I. Evaluation of a Microlens Array using Optical Interferometry. STR/03/046/PM1. www.simtech.a-star.edu.sg/Research/ TechnicalReports/TR0366.pdf.
19. Sickinger H, Schwider J. Modified MachZehnder interference microscope for the testing of cylindrical microlenses. www.optik.uni-erlangen.de/mpf/php/.../ files/.../anrep-99-move.pdf.
20. H. Elfstrom, A. Lehmuskero, T.S. Stamoinen, M. Kuittinen, and P. Vahimaa Common-path interferometer with diffractive lens Opt Exp 14 2006 3847 3852
21. F. Charriere, J. Kuhn, T. Colomb, F. Montfort, E. Cuche, and Y. Emery Characterization of microlenses by digital holographic microscopy Appl Opt 45 2006 829 835
22. H. Sickinger, O. Falkenstorfer, N. Lindlein, and J. Schwide Characterization of microlenses using a phase-shifting shearing interferometer Opt Eng 33 1994 2680 2686
23. E. Acosta, D. Vazquez, L. Garner, and G. Smith Tomographic method for measurement of the gradient refractive index of the crystalline lens. I. The spherical fish lens J Opt Soc Am A22 2005 424 433
24. I. Verrier, C. Veillas, and T. Lepine Low coherence interferometry for central thickness measurement of rigid and soft contact lenses Opt Exp 17 2009 9157 9170
25. B. Heise, and D. Stifter Quantitative phase reconstruction for orthogonal-scanning differential phase-contrast optical coherence tomography Opt Lett 34 2009 1306 1308
26. D. Huang, E.A. Swanson, C.P. Lin, J.S. Schuman, W.G. Stinson, and W. Chang Optical coherence tomography Science 254 1991 1178 1181
27. B.E. Bouma, and G.J. Tearney Handbook of optical coherence tomography 2002 Marcel Dekker New York
28. J.M. Schmitt Optical coherence tomography (OCT): a review IEEE J Sel Top Quantum Electron 5 1999 1205 1215
29. A.F. Fercher, W. Drexler, C.K. Hitzenberger, and T. Lasser Optical coherence tomographyprinciples and applications Rep Prog Phys 66 2003 239 303
30. P.H. Tomlins, and R.K. Wang Theory, developments and applications of optical coherence tomography J Phys D: Appl Phys 38 2005 2519 2535
31. D. Stifter Beyond biomedicine: a review of alternative applications and developments for optical coherence tomography Appl Phys B88 2007 337 357
32. S.K. Dubey, T. Anna, C. Shakher, and D.S. Mehta Fingerprint detection using full-field swept-source optical coherence tomography Appl Phys Lett 91 2007 181106 181108
33. R. Leitbeg, C.K. Hitzenberger, and A.F. Fercher Performance of Fourier domain vs. time domain optical coherence tomography Opt Exp 11 2003 889 894
34. J.F. de Boer, B. Cense, B.H. Park, M.C. Pierce, G.J. Tearney, and B.E. Bouma Improved signal-to-noise ratio in spectral-domain compared with time-domain optical coherence tomography Opt Lett 28 2003 2067 2069
35. R.A. Leitgeb, W. Drexler, A. Unterherber, B. Hermann, T. Bajraszewski, and T. Le Ultrahigh resolution Fourier domain optical coherence tomography Opt Exp 12 2004 2156 2165
36. B. Potsaid, I. Gorczynska, V.J. Srinivasan, Y. Chen, J. Jiang, and A. Cable Ultrahigh speed spectral/Fourier domain OCT ophthalmic imaging at 70,000 to 312,500 axial scans per second Opt Exp 16 2008 15149 15169
37. M.V. Sarunic, M.A. Choma, C. Yang, and J.A. Izatt Instantaneous complex conjugate resolved spectral and swept-source OCT using 3×3 fiber couplers Opt Exp 13 2005 957 967
38. M.A. Choma, M.V. Sarunic, C. Yang, and J.A. Izatt Sensitivity advantage of swept source and Fourier domain optical coherence tomography Opt Exp 11 2003 2183 2189
39. H. Lim, J.F. de Boer, B.H. Park, E.C.W. Lee, R. Yelin, and S.H. Yun Optical frequency domain imaging with a rapidly swept laser in the 815870 nm range Opt Exp 14 2006 5937 5944
40. M. Wojtkowski, T. Bajraszewski, P. Targowski, and A. Kowalczyk Real time in vivo imaging by high-speed spectral optical coherence tomography Opt Lett 28 2003 1745 1747
41. T. Anna, C. Shakher, and D.S. Mehta Simultaneous tomography and topography of silicon integrated circuits using full-field swept-source optical coherence tomography J Opt A: Pure Appl Opt 11 2009 045501 045509
42. P. Hariharan Optical interferometry 3rd ed 2003 Academic Press USA