Combined Twyman-Green and Mach-Zehnder interferometer for microlens testing

Applied Optics

Volumn 44, Issue 27, 2005, Pages 5786-5792

  Reichelt, Stephan ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; CHARACTERIZATION; LIGHT TRANSMISSION; MICROLENSES; PHASE SHIFT; TESTING;

AZIMUTHAL ORIENTATION; CURVATURE; MACH-ZEHNDER INTERFEROMETERS; MICROLENS TESTING;

INTERFEROMETERS;

EID: 27144534092     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.005786     Document Type: Conference Paper

References (20)

1. M. C. Hutley, "Manufacture and testing of microlens arrays," in Optics in Complex Systems, F. Lanzl and G. Weigelt, eds., Proc. SPIE 1319, 491-492 (1990).
2. M. C. Hutley, D. J. Daly, and R. F. Stevens, The Testing of Microlens Arrays, Vol. 30 of IOP Short Meeting Series (IOP Publishing, 1991), pp. 67-81.
3. P. Nussbaum, R. Völkel, H. P. Herzig, M. Eisner, and S. Ha-selbeck, "Design, fabrication and testing of microlens arrays for sensors and microsystems," Pure Appl. Opt. 6, 617-636 (1997).
4. D. Daly, Microlens Arrays (Taylor & Francis, 2001).
5. W. Moench and H. Zappe, "Fabrication and testing of microlens arrays by all-liquid techniques," J. Opt. A Pure Appl. Opt. 6, 330-337 (2004).
6. K. O. Mersereau, R. J. Crisci, C. R. Nijander, W. P. Townsend, D. J. Daly, and M. C. Hutley, "Testing and measurement of microlenses," in Miniature and Micro-Optics and Micromechanics, N. C. Gallagher and C. S. Roychoudhuri, eds., Proc. SPIE 1992, 210-215 (1993).
7. J. Schwider and H. Sickinger, "Array test for microlenses," Optik 107, 26-34 (1997).
8. J. Schwider, N. Lindlein, R. Schreiner, J. Lamprecht, G. Leuchs, J. Pfund, and M. Beyerlein, "Optikprüfung von refraktiven Mikrolinsen," Tech. Messen 69, 467-482 (2002).
9. J. Schwider and O. Falkenstörfer, "Twyman-Green interferometer for testing microspheres," Opt. Eng. 34, 2972-2975 (1995).
10. L. Falco, J.-C. Vuilleumier, and E. Muharemovic, "Automated Twyman-Green interferometer for micro-lens arrays characterization," presented at the 10th Microoptics Conference, Jena, Germany, 1-3 September 2004.
11. D. J. Daly, M. C. Hutley, and R. F. Stevens, "Mach Zehnder interferometer for measuring microlenses," in Interferometry '94: New Techniques and Analysis in Optical Measurements, M. Kujawinska and K. Patorski, eds., Proc. SPIE 2340, 258-263 (1994).
12. H. Sickinger, J. Schwider, and B. Manzke, "Fiber based Mach-Zehnder interferometer for measuring wave aberrations of microlenses," Optik 110, 239-243 (1999).
13. T. Miyashita, K. Hamanaka, M. Kato, S. Ishihara, H. Sato, E. Sato, and T. Morokuma, "Wavefront aberration measurement technology for microlens using the Mach-Zehnder interferometer provided with a projected aperture," in Interferometry XII: Applications, W. Osten and E. Novak, eds., Proc. SPIE 5532, 117-127 (2004).
14. W. Krug and E. Lau, "Ein Interferenzmikroskop für Durchund Auflichtbeobachtungen," Annalen der Physik 6, 329-340 (1951).
15. H. Sickinger, O. Falkenstörfer, N. Lindlein, and J. Schwider, "Characterization of microlenses using a phase-shifting shearing interferometer," Opt. Eng. 33, 2680-2668 (1994).
16. J. H. Burning and D. R. Herriott, "A versatile laser interderometer,-," Appl. Opt. 9, 2180-2182 (1970).
17. A. E. Jensen, "Absolute calibration method for laser Twyman-Green wavefront testing interferometers," J. Opt. Soc. Am. 63, 1313A (1973) (abstract only).
18. P. Manns, G. Kleer, and W. Döll, "Heissprägung von Mikrostrukturen in anorganische Gläser für Anwendungen in der optischen Sensorik," in Kurzreferate Glastechnische Tagung (Glastechnische Gesellschaft, 2000), pp. 102-106.
19. K. Creath and J. C. Wyant, "Testing spherical surfaces: a fast, quasi-absolute technique," Appl. Opt. 31, 4350-4354 (1992).
20. C. J. Evans, R. E. Parks, P. J. Sullivan, and J. S. Taylor, "Visualization of surface figure by the use of Zernike polynomials," Appl. Opt. 34, 7815-7819 (1995).