Optical inspection and characterization of microoptics using confocal microscopy

Optics and Lasers in Engineering

Volumn 36, Issue 5, 2001, Pages 403-415

  Tiziani, H J ^a   Haist, T ^a   Reuter, S ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Aberration; Common path interferometry; Confocal microscopy; Microlens array; OALCD; OASLM; Self filter

Indexed keywords

ABERRATIONS; INTERFEROMETRY; MICROLENSES; OPTICAL FILTERS; POINT DEFECTS;

CONFOCAL MICROSCOPY;

MICROOPTICS;

EID: 0035499586     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00068-9     Document Type: Article

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