Manufacture of micromirror arrays using a CMOS-MEMS technique

Sensors

Volumn 9, Issue 8, 2009, Pages 6219-6231

  Kao, Pin Hsu ^a   Dai, Ching Liang ^a   Hsu, Cheng Chih ^b   Wu, Chyan Chyi ^c  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b YUAN ZE UNIVERSITY   (Taiwan)

^c TAMKANG UNIVERSITY   (Taiwan)

Author keywords

CMOS MEMS; Microactuator; Micromirror array

Indexed keywords

CIRCULAR MEMBRANES; CMOS (COMPLEMENTARY METAL OXIDE SEMICONDUCTOR); CMOS-MEMS; MEMS (MICROELECTROMECHANICAL SYSTEM); MICROMIRROR ARRAY; MOTION ANALYSIS SYSTEM; SACRIFICIAL LAYER; STANDARD CMOS PROCESS;

CMOS INTEGRATED CIRCUITS; ELECTROMECHANICAL DEVICES; MICROACTUATORS; NATURAL FREQUENCIES;

MEMS;

EID: 70349636339     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s90806219     Document Type: Article

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