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Volumn 109, Issue 2, 2005, Pages 190-193

A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and a thin film heater: Part 2: CO sensing

Author keywords

Carbon monoxide detection; Catalytic thick film; Low power consumption; Micromachined gas sensor; Thin film heater; Tin dioxide thin film

Indexed keywords

CARBON MONOXIDE; ELECTRIC POWER UTILIZATION; MICROMACHINING; SILICON COMPOUNDS; THIN FILMS; TIN COMPOUNDS;

EID: 22944483439     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.05.012     Document Type: Article
Times cited : (34)

References (8)
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    • 22944492829 scopus 로고
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    • M. Nagase, and H. Futata A town gas alarm with a pair of semiconductive gas sensors Anal. Chem. Symp. Ser. 17 1983 67 72
    • (1983) Anal. Chem. Symp. Ser. , vol.17 , pp. 67-72
    • Nagase, M.1    Futata, H.2
  • 2
    • 0024665090 scopus 로고
    • General characteristics of thermally cycled tin oxide gas sensors
    • W.M. Sears, K. Colbow, and F. Consadori General characteristics of thermally cycled tin oxide gas sensors Semicond. Sci. Technol. 4 1989 351 359
    • (1989) Semicond. Sci. Technol. , vol.4 , pp. 351-359
    • Sears, W.M.1    Colbow, K.2    Consadori, F.3
  • 3
    • 0025210817 scopus 로고
    • Carbon monoxide gas detector with shortened detecting cycle
    • T. Oyabu, Y. Matsuura, and R. Murai Carbon monoxide gas detector with shortened detecting cycle Sens. Actuators B 1 1990 218 221
    • (1990) Sens. Actuators B , vol.1 , pp. 218-221
    • Oyabu, T.1    Matsuura, Y.2    Murai, R.3
  • 5
    • 0035368319 scopus 로고    scopus 로고
    • Ultralow power carbon monoxide microsensor by micromachining techniques
    • P.P. Tsai, I.-C. Chen, and C.-J. Ho Ultralow power carbon monoxide microsensor by micromachining techniques Sens. Actuators B 76 2001 380 387
    • (2001) Sens. Actuators B , vol.76 , pp. 380-387
    • Tsai, P.P.1    Chen, I.-C.2    Ho, C.-J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.