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Volumn 109, Issue 2, 2005, Pages 190-193
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A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and a thin film heater: Part 2: CO sensing
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Author keywords
Carbon monoxide detection; Catalytic thick film; Low power consumption; Micromachined gas sensor; Thin film heater; Tin dioxide thin film
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Indexed keywords
CARBON MONOXIDE;
ELECTRIC POWER UTILIZATION;
MICROMACHINING;
SILICON COMPOUNDS;
THIN FILMS;
TIN COMPOUNDS;
CARBON MONOXIDE DETECTION;
CATALYTIC THICK FILMS;
LOW POWER CONSUMPTION;
MICROMACHINED GAS SENSOR;
THIN FILM HEATER;
TIN DIOXIDE THIN FILM;
CHEMICAL SENSORS;
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EID: 22944483439
PISSN: 09254005
EISSN: None
Source Type: Journal
DOI: 10.1016/j.snb.2005.05.012 Document Type: Article |
Times cited : (34)
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References (8)
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