NOx sensing properties of In2O3 nanoparticles prepared by metal organic chemical vapor deposition

Sensors and Actuators, B: Chemical

Volumn 130, Issue 2, 2008, Pages 589-593

  Wang, Ch Y ^a   Ali, M ^a   Kups, Th ^a   Rohlig C C ^a   Cimalla, V ^a   Stauden, Th ^a   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

In2O3 nanoparticles; MOCVD; NOx

Indexed keywords

CHEMICAL SENSORS; INDIUM COMPOUNDS; LOW TEMPERATURE EFFECTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITRIC OXIDE; PARTIAL PRESSURE; THICK FILMS;

CROSS SENSITIVITY; SENSING PROPERTIES; SENSOR RESPONSE;

NANOPARTICLES;

EID: 40949137895     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.10.015     Document Type: Article

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