Characterization of low-resistivity indium oxide films by Auger electron spectroscopy, x-ray photoelectron spectroscopy, and x-ray diffraction and correlation between their properties, composition, and texture

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 293-298

  Jeong, J I ^a   Moon, J H ^a   Hong, J H ^a   Kang, J S ^a   Fukuda, Y ^b   Lee, Y P ^c  

^a Research Institute of Industrial Science and Technology (RIST)   (South Korea)

^b SHIZUOKA UNIVERSITY   (Japan)

^c SunMoon University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030529836     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579891     Document Type: Article

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