Structural, optical and secondary electron emission properties of diamond like carbon thin films deposited by pulsed-DC plasma CVD technique

Solid State Sciences

Volumn 12, Issue 8, 2010, Pages 1449-1454

  Rai, D K ^a   Datta, Debjit ^b   Ram, Sanjay K ^c   Sarkar, Surajit ^b   Gupta, Rajeev ^b   Kumar, Satyendra ^b  

^a UNIVERSITY OF CINCINNATI   (United States)

^b INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^c Center of Excellence in Microelectronics Optoelectronics and Processes   (Portugal)

Author keywords

Atomic force microscopy; Diamond like carbon; Fourier transform infra red spectroscopy; Plasma displays; Secondary electron emission; Spectroscopic ellipsometry

Indexed keywords

DEPOSITION PARAMETERS; DIAMOND LIKE CARBON; DIAMOND-LIKE CARBON THIN FILMS; DIELECTRIC LAYER; DLC COATINGS; DLC FILM; FEED GAS; FIRING VOLTAGE; FTIR; GAS-FLOW RATIO; HYDROGEN DILUTION; LONG TERM; OPERATING PRESSURE; PLASMA DISPLAY PANEL; PLASMA DISPLAYS; POWER SUPPLY; PULSED DC; SECONDARY ELECTRON EMISSION; SECONDARY ELECTRON EMISSION COEFFICIENTS; SECONDARY ELECTRON EMISSIONS; TAUC-LORENTZ MODELS; WIDE SPECTRAL RANGE;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBON FILMS; COATINGS; DC POWER TRANSMISSION; DIAMONDS; ELECTRONS; FOURIER TRANSFORMS; ORGANIC POLYMERS; PLASMA DEPOSITION; PLASMA DISPLAY DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; REFRACTIVE INDEX; SECONDARY EMISSION; SPECTROSCOPIC ELLIPSOMETRY; WAVELET TRANSFORMS;

DIAMOND LIKE CARBON FILMS;

EID: 77955424915     PISSN: 12932558     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solidstatesciences.2010.05.027     Document Type: Article

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