Growth of hydrogenated amorphous carbon films in pulsed d.c. methane discharges

Diamond and Related Materials

Volumn 12, Issue 2, 2003, Pages 98-104

  Andujar J L ^a   Vives, M ^a   Corbella, C ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Diamond like carbon; Hydrogenated amorphous carbon; PECVD; Pulsed plasma

Indexed keywords

CAPACITANCE; CARBON; COMPRESSIVE STRESS; ELECTRIC DISCHARGES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

DIAMOND-LIKE CARBON;

EID: 0344519569     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00009-8     Document Type: Article

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