Ellipsometric studies of diamond like carbon films prepared by PECVD using pulsed DC power supply

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1198-1201

  Rai, D K ^a   Datta, Debjit ^a   Gupta, Rajeev ^a   Kumar, Satyendra ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MODELS; CHEMICAL VAPOR; COMPLEX REFRACTIVE INDEX; COMPOSITIONAL PROPERTIES; GLOW DISCHARGE DEPOSITION; HIGH DEPOSITION RATES; PHASE MODULATED SPECTROSCOPIC ELLIPSOMETRY; PULSED DC; PULSED DC POWER SUPPLY; PULSED-DC GLOW DISCHARGE; TRANSMISSION SPECTROSCOPY;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLOW DISCHARGES; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; PLASMA DEPOSITION; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; SPONTANEOUS EMISSION; SURFACE PROPERTIES;

DIAMOND LIKE CARBON FILMS;

EID: 77951126864     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200777837     Document Type: Conference Paper

References (10)

1. C. Casiraghi, J. Robertson, and A. C. Ferrari, Materials Today 44, 1 (2007).
2. P.K. Bachmann, V. van Elsbergen, D.U. Wiechert, G. Zhong, and J. Robertson, Diamond Relat. Mater. 10, 809 (2001).
3. J.L. Andujar, M. Vives, C. Corbella, and E. Bertran, Diamond Relat. Mater. 12, 98 (2003).
4. M. Malhotra and S. Kumar, Diamond Relat. Mater. 6, 1830 (1997).
5. M. Malhotra, T. Som, V.N. Kulkarni, and S. Kumar, Vacuum 47, 1265 (1996).
6. W. S. Choi, J. Heoa, I. Chunga, and Byungyou Hong, Thin Solid Films 475, 287 (2005).
7. T. Easwarakhanthan, D. Beyssen, L. Le Brizoual, and P. Alnot, J. Appl. Phys. 101, 073102 (2007).
8. B. Drévillon, Prog. Cryst. Growth Charat. Mater. 27, 1 (1993).
9. A. R. Forouhi and I. Bloomer, Phys. Rev. B 34, 7018 (1986).
10. M. Malhotra and S. Kumar, Internat. J. Mod. Phys. B 16, 860 (2002).