Fabrication of gas ionization sensor using carbon nanotube arrays grown on porous silicon substrate

Sensors and Actuators, A: Physical

Volumn 162, Issue 1, 2010, Pages 24-28

  Nikfarjam, Alireza ^a   Zad, Azam Iraji ^a   Razi, Fatemeh ^a   Mortazavi, S Zahra ^a  

^a SHARIF UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

Gas ionization sensor; Multiwalled carbon nanotube; Porous silicon

Indexed keywords

BREAKDOWN VOLTAGE; CARBON NANOTUBE ARRAY; DISCHARGE CURRENTS; DRY AIR; FIELD IONIZATION; GAS IONIZATION SENSOR; GAS SENSORS; HIGH ELECTRIC FIELDS; POROUS SILICON SUBSTRATES; POROUS SUBSTRATES; PREBREAKDOWN; SHORT RESPONSE TIME; SILICON SUBSTRATES; THERMAL CHEMICAL VAPOR DEPOSITION;

CARBON NANOTUBES; CHEMICAL SENSORS; ELECTRIC BREAKDOWN; ELECTRIC FIELDS; FABRICATION; GASES; GEOGRAPHIC INFORMATION SYSTEMS; MECHANICAL STABILITY; MULTIWALLED CARBON NANOTUBES (MWCN); PARTICLE DETECTORS; POROUS SILICON; SUBSTRATES;

IONIZATION OF GASES;

EID: 77955423514     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.06.015     Document Type: Article

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