A MEMS-based ionization gas sensor using carbon nanotubes

IEEE Transactions on Electron Devices

Volumn 54, Issue 6, 2007, Pages 1545-1548

  Hou, Zhongyu ^a   Wu, Jiahao ^a   Zhou, Weimin ^b   Wei, Xing ^a   Xu, Dong ^a   Zhang, Yafang ^a   Cai, Bingchu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b Shanghai Nanotechnology Promotion Center   (China)

Author keywords

Carbon nanotubes (CNTs); Gas discharges; Ionization gas sensors; Microelectromechanical systems (MEMS)

Indexed keywords

CARBON NANOTUBES; ELECTRIC FIELDS; ELECTRODES; GAS DISCHARGE TUBES; IONIZATION OF GASES; MEMS; CARBON DIOXIDE; ELECTROMECHANICAL DEVICES; GAS DETECTORS; MICROMECHANICS;

ELECTRODE MATERIAL; IONIZATION GAS SENSORS; SMART DEVICE;

CHEMICAL SENSORS;

ELECTRODE MATERIAL; GAS DISCHARGE; HIGH SENSITIVITY; IONIZATION GAS SENSORS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); OPERATION VOLTAGE; SMART DEVICES; VOLTAGE CRITERION;

EID: 34250699980     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.896370     Document Type: Article

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