Simulation tool design for the two-axis nano stage of lithography systems

Mechatronics

Volumn 20, Issue 5, 2010, Pages 574-581

  Jung, Jongchul ^a   Huh, Kunsoo ^b  

^a LS Industrial Systems Co Ltd   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

Creep; Hysteresis; Nano stage; Piezo actuator; Simulation tool

Indexed keywords

ACTUATORS; CREEP; DIFFERENTIAL EQUATIONS; ELECTRON BEAM LITHOGRAPHY; NANOTECHNOLOGY;

FIRST ORDER DIFFERENTIAL EQUATION; HYSTERESIS AND CREEPS; LITHOGRAPHY SYSTEMS; LOGARITHMIC FUNCTIONS; MULTI-BODY DYNAMIC; NANO-STAGE; NONLINEAR PROPERTIES; PIEZO ACTUATOR;

HYSTERESIS;

EID: 77955418729     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2010.06.003     Document Type: Article

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