Modeling of piezo-flexural nanopositioning systems subjected to rate-varying inputs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6525, Issue , 2007, Pages

  Bashash, Saeid ^a   Jalili, Nader ^a  

^a AMRL   (United States)

Author keywords

Hysteresis modeling and piezo flexural systems; Nanopositioning

Indexed keywords

APPROXIMATION THEORY; CONTROL NONLINEARITIES; DYNAMIC MODELS; DYNAMICAL SYSTEMS; HYSTERESIS; POSITION CONTROL;

HYSTERESIS MODELING; NANOPOSITIONING; PIEZO-FLEXURAL SYSTEMS; SYSTEM DYNAMICS;

PIEZOELECTRIC DEVICES;

EID: 35548941200     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.715818     Document Type: Conference Paper

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