An approach to multilayer microfluidic systems with integrated electrical, optical, and mechanical functionality

IEEE Sensors Journal

Volumn 5, Issue 1, 2005, Pages 82-89

  Han, Arum ^a   Graff, Mason ^a   Wang, Olivia ^a   Frazier, A Bruno ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bio microelectromechanical systems (bio MEMS); Bioanalysis; Microelectromechanical systems (MEMS); Microfluidics; Microsystem

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRODES; ELECTRONICS PACKAGING; INTEGRATED OPTICS; LIGHT SCATTERING; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES;

BIO-MICROELECTROMECHANICAL SYSTEMS (BIO-MEMS); BIOANALYSIS; MECHANICAL FUNCTIONALITY; MICROFLUIDICS; MICROSYSTEM;

FLUIDICS;

EID: 13144260721     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2004.838666     Document Type: Article

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