Study of a high performance AFM probe-based microscribing process

Journal of Manufacturing Science and Engineering

Volumn 132, Issue 3, 2010, Pages 0309061-03090610

  Bourne, Keith ^a   Kapoor, Shiv G ^a   DeVor, Richard E ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CUTTING; MACHINE TOOLS; MOUNTINGS; PROBES; WEAR OF MATERIALS;

CHIP FORMATIONS; CUTTING GROOVES; EFFECTIVE RAKE ANGLE; GROOVE FORMATION; MICRO-SCRIBING; MOTION PLATFORMS; MOUNTING ANGLES; SYSTEMATIC EXPERIMENT;

CUTTING TOOLS;

EID: 77955341520     PISSN: 10871357     EISSN: 15288935     Source Type: Journal    
DOI: 10.1115/1.4001414     Document Type: Article

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