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Volumn 5662, Issue , 2004, Pages 501-506
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Micro-machining using 1.55μm band fiber pulse laser with 10kW peak power
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Author keywords
1.55 m; Diamond like carbon; Fiber laser; Lithium niobate; Mico scribing; Micro drilling; Micro machining; Sapphire; Silicon; Tungsten
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Indexed keywords
1.55ΜM;
DIAMOND-LIKE CARBON;
DISTRIBUTED FEEDBACK LASER DIODE (DFBLD);
MICRO-DRILLING;
MICRO-SCRIBING;
AMPLIFICATION;
DOPING (ADDITIVES);
ERBIUM;
LASER PULSES;
LITHIUM NIOBATE;
MICROMACHINING;
MULTIMODE FIBERS;
SAPPHIRE;
SEMICONDUCTOR LASERS;
SILICON;
SPONTANEOUS EMISSION;
TUNGSTEN;
FIBER LASERS;
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EID: 20344370012
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.596380 Document Type: Conference Paper |
Times cited : (2)
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References (5)
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