A new acceleration-based methodology for micro/meso-scale machine tool performance evaluation

International Journal of Machine Tools and Manufacture

Volumn 46, Issue 12-13, 2006, Pages 1435-1444

  Phillip, Andrew G ^a   Kapoor, Shiv G ^a   DeVor, Richard E ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Acceleration requirements; Micro machining motion parameters; Micro meso scale machine tool; Performance evaluation

Indexed keywords

ACCELERATION; BANDWIDTH; ERROR ANALYSIS; MACHINE TOOLS; MATHEMATICAL MODELS;

ACCELERATION REQUIREMENTS; MICRO/MESO-SCALE MACHINE TOOLS; MICROMACHINING MOTION PARAMETERS; PERFORMANCE EVALUATION;

MICROMACHINING;

EID: 33746340630     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2005.09.015     Document Type: Article

References (17)

1. R. Subrahmanian, K.F. Ehmann, Development of a meso-scale machine tool (MMT) for micro-machining, in: Proceedings of the Japan-USA Symposium on Flexible Automation, Hiroshima, Japan, 14-19 July 2002, pp. 163-169.
2. M.P. Vogler, X. Liu, S.G. Kapoor, R.E. DeVor, K.F. Ehmann, Development of meso-scale machine tool (mMT) Systems, in: Proceedings of the NAMRC XXX Conference, West Lafayette, IN, 21-24 May 2002, pp. 1-9.
3. N. Mishima, K. Ashida, M. Tanaka, Development of machine tools for the microfactory, in: Proceedings from the Second International Workshop on Microfactories, Fribourg, Switzerland, 9-10 October 2000, pp. 137-140.
4. J. Werkmeister, A. Slocum, Design and fabrication of the mesomill: a five-axis milling machine for meso-scaled parts, in: Proceedings of Machines and Processes for Microscale and Meso-scale Fabrication, Metrology and Assembly, 22-23 January 2003, pp. 79-82.
5. Geldart M., Webb P., Larsson H., Backstrom M., Gindy N., and Rask K. A direct comparison of the machining performance of a variax 5 axis parallel kinetic machining centre with conventional 3 and 5 axis machine tools. International Journal of Machine Tools and Manufacture 43 (2003) 1107-1116
6. International Standards Organization, ISO 10791, 1998 (E).
7. Tomita Y., Makino K., Sugimine M., and Taniguchi N. High-response X-Y stage system driven by in-parallel linear motors. Annals of the CIRP 45/1 (1996) 359-362
8. Inasaki I. Surface grinding machine with a linear-motor-driven table system: development and performance test. Annals of the CIRP 48/1 (1999) 243-246
9. D. Cox, G. Newby, H.W. Park, S.Y. Liang, Performance evaluation of a miniaturized machining center for precision manufacturing, in: Proceedings of the ASME International Mechanical Engineering Congress and Exposition, Anaheim, CA, 15-17 November 2004, pp. 503-510.
10. Friedrich C.R., and Vasile M.J. Development of the micromilling process for high-aspect-ratio microstructures. Journal of Microelectromechanical Systems 5/1 (1996) 33-38
11. Y. Okazaki, Development of a desk-top milling machine with a 300 krpm spindle and a linear motor stage, in: Proceedings from the Second International Workshop on Microfactories, Shanghai, China, 15-17 October 2004, pp. 29-33.
12. Liu X., DeVor R.E., Kapoor S.G., and Ehmann K.F. The mechanics of machining at the microscale: assessment of the current state of the science. Journal of Manufacturing Science and Engineering 126/4 (2004) 666-678
13. Weule H., Hüntrup V., and Tritschler H. Micromilling of steel to meet new requirements in minaturization. Annals of the CIRP 50/1 (2001) 61-64
14. Schaller T., Bohn L., Mayer J., and Schubert K. Microstructure grooves with a width of less than 50 μm cut with ground hard metal micro end mills. Precision Engineering 23 (1999) 229-235
15. Vogler M.P., DeVor R.E., and Kapoor S.G. On the modeling and analysis of machining performance in micro-endmilling, Part I: surface generation. Journal of Manufacturing Science and Engineering 126 (2004) 685-694
16. M. Jun, Modeling and analysis of micro-end milling dynamics, Ph.D. Thesis, University of Illinois at Urbana-Champaign, Urbana, IL, 2005.
17. Oberg E., Jones F.D., Horton H.L., and Ryffel H.H. Machinery's Handbook. 26th ed (2000), Industrial Press Inc, New York