Prevention of hillock formation during micro-machining of silicon by using OTS-SAM and SiO2 coatings

CIRP Annals - Manufacturing Technology

Volumn 59, Issue 1, 2010, Pages 259-262

  Oh, T S ^a   Kim, H J ^a   Kim, D E ^a  

^a Yonsei University   (South Korea)

Author keywords

Micro machining; OTS SAM; Silicon

Indexed keywords

CHEMICAL-ETCHING PROCESS; COATING SYSTEM; GROOVE PATTERNS; HILLOCK FORMATION; SACRIFICIAL LAYER; SILICON SUBSTRATES;

COATINGS; MICROMACHINING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

SILICON OXIDES;

EID: 77955311031     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2010.03.084     Document Type: Article

References (26)

1. D.M. Chun, M.H. Kim, J.C. Lee, and S.H. Ahn A Nanoparticle Deposition System for Ceramic and Metal Coating at Room Temperature and Low Vacuum Conditions International Journal of Precision Engineering & Manufacturing 9 1 2008 51 53
2. W. Shin, S. Park, H. Kim, S. Joo, and H. Jeong Local/Global Planarization of Polysilicon Micropatterns by Selectivity Controlled CMP International Journal of Precision Engineering & Manufacturing 10 3 2009 31 36
3. E.S. Lee, S.C. Hwang, J.T. Lee, and J.K. Won A Study on the Characteristic of Parameters by the Response Surface Method in Final Wafer Polishing International Journal of Precision Engineering & Manufacturing 10 3 2009 25 30
4. X. Cheng, K. Nakamoto, M. Sugai, S. Matsumoto, Z.G. Wang, and K. Yamazaki Development of Ultra-precision Machining System with Unique Wire EDM Tool Fabrication System for Micro/nano-machining CIRP Annals-Manufacturing Technology 57 1 2008 415 420
5. I.H. Sung, and D.E. Kim Nano-scale Patterning by Mechano-chemical Scanning Probe Lithography Applied Surface Science 239 2 2005 209 221
6. I.H. Sung, H.S. Lee, and D.E. Kim Effect of Surface Topography on the Frictional Behavior at the Micro/nano-scale Wear 254 10 2003 1019 1031
7. I.H. Sung, and D.E. Kim Study on Nanoscale Abrasive Interaction Between Nanoprobe and Self-assembled Molecular Surface for Probe-based Nanolithography Process Ultramicroscopy 107 1 2007 1 7
8. J.M. Lee, I.H. Sung, and D.E. Kim Process Development of Precision Surface Micro-machining using Mechanical Abrasion and Chemical Etching Microsystem Technologies 8 6 2002 419 426
9. H.J. Kim, and D.E. Kim Nano-scale Friction: A Review International Journal of Precision Engineering & Manufacturing 10 2 2009 141 151
10. M. Rathinam, R. Thillaigovindan, and P. Paramasivan Nanoindentation of Aluminum (1 0 0) at Various Temperatures Journal of Mechanical Science & Technology 23 10 2009 2652 2657
11. I.H. Sung, J.C. Yang, D.E. Kim, and B.S. Shin Micro/nano-tribological Characteristics of Self-assembled Monolayer and its Application in Nano-structure Fabrication Wear 255 7-12 2003 808 818
12. I.H. Sung, and D.E. Kim Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process International Journal of KSPE 4 5 2003 22 26
13. E.Y. Kwon, Y.T. Kim, and D.E. Kim Investigation of Penetration Force of Living Cell Using an Atomic Force Microscope Journal of Mechanical Science & Technology 23 7 2009 1932 1938
14. J.M. Lee, W.H. Jin, and D.E. Kim Application of Single Asperity Abrasion Process for Surface Micromachining Wear 251 1-12 2001 1133 1143
15. K.H. Chung, Y.H. Lee, and D.E. Kim Characteristics of Fracture During the Approach Process and Wear Mechanism of a Silicon AFM Tip Ultramicroscopy 102 2 2005 161 171
16. D.E. Kim, and J.J. Yi Micro-patterning of Silicon by Frictional Interaction and Chemical Reaction ASME Journal of Tribology 120 1998 353 357
17. D.E. Kim, I.H. Sung, and J.M. Lee Mechano-chemical Process for Flexible Surface Micro-machining 35th CIRP Int. Seminar on Manufac. Syst. May 13-15 2002 496 499
18. U. Srinivasan, M.R. Houston, R.T. Howe, and R. Maboudian Alkyltrichlorosilane-based Self-assembled Monolayer Films for Stiction Reduction in Silicon Micromachines IEEE Journal of MEMS 7 2 1998 252 260
19. W.R. McKenzie, H. Domyo, T. Ho, and P.R. Munroe Re-crystallisation of Amorphous Silicon in the Production of Low Defect Density Silicon on Sapphire Thin Films Microscopy and Microanalysis 11 2 2005 2088 2089
20. C.F. Sanz-Navarro, S.D. Kenny, and R. Smith Atomistic Simulations of Structural Transformations of Silicon Surfaces Under Nanoindentation Nanotechnology 15 2004 692 697
21. S. Shimada, N. Ikawa, T. Inamura, N. Takezawa, H. Ohmori, and T. Sata Brittle-Ductile Transition Phenomena in Microindentation and Micromachining CIRP Annals-Manufacturing Technology 44 1 1995 523 526
22. J.W. Park, D.W. Lee, N. Kawasegi, and N. Morita Nanoscale Fabrication in Aqueous Solution using Tribo-Nanolithography International Journal of Precision Engineering & Manufacturing 7 4 2006 8 13
23. N. Kawasegi, N. Morita, S. Yamada, N. Takano, T. Oyama, and K. Ashida Etch Stop of Silicon Surface Induced by Tribo-Nanolithography Nanotechnology 16 2005 1411 1414
24. S.R. Wasserman, Y.T. Tao, and G.M. Whitesides Structure and Reactivity of Alkylsiloxane Monolayers Formed by Reaction of Alkyltrichlorosilanes on Silicon Substrates Langmuir 5 4 1989 1074 1087
25. R.C. Thomas, J.E. Houston, T.A. Michalske, and R.M. Crooks The Mechanical Response of Gold Substrates Passivated by Self-assembling Monolayer Films Science 259 5103 1993 1883 1885
26. K.R. Williams, K. Gupta, and M. Wasilik Etch Rates for Micromachining Processing - Part II Journal of MEMS 12 6 2003 761 778