Study on nanoscale abrasive interaction between nanoprobe and self-assembled molecular surface for probe-based nanolithography process

Ultramicroscopy

Volumn 107, Issue 1, 2007, Pages 1-7

  Sung, In Ha ^a   Kim, Dae Eun ^b  

^a Hannam University   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

Atomic force microscopy (AFM); Molecular dynamics; Nanolithography; Nanotribology; Self assembled monolayer

Indexed keywords

ABRASIVES; COMPUTER SIMULATION; LITHOGRAPHY; MOLECULAR DYNAMICS; NANOSTRUCTURED MATERIALS; SELF ASSEMBLY; TRIBOLOGY;

MECHANO CHEMICAL SCANNING; MOLECULAR DYNAMICS SIMULATION; NANOTRIBOLOGY; SCANNING PROBE LITHOGRAPHY (SPL);

NANOTECHNOLOGY;

THIOL;

ARTICLE; ATOMIC FORCE MICROSCOPY; MOLECULAR DYNAMICS; MOLECULAR INTERACTION; MOLECULAR PROBE; NANOTECHNOLOGY; SIMULATION; SURFACE PROPERTY;

EID: 33751201562     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2006.04.010     Document Type: Article

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