SAR500 - A high-precision high-stability butterfly gyroscope with north seeking capability

Record - IEEE PLANS, Position Location and Navigation Symposium

Volumn , Issue , 2010, Pages 6-13

  Lapadatu, Daniel ^a   Blixhavn, Bjørn ^a   Holm, Reidar ^a   Kvisterøy, Terje ^a  

^a Sensonor Technologies AS   (Norway)

Author keywords

High performance; High stability; Low noise; North seeking capable MEMS gyroscope

Indexed keywords

BROAD TEMPERATURE RANGES; CERAMIC PACKAGE; DETECTION FREQUENCY; DIGITAL OUTPUT; HIGH Q FACTOR; HIGH THERMAL; HIGH-ACCURACY; HIGH-PRECISION; LOW NOISE; LOW SENSITIVITY; MEMS GYROSCOPE; NORTH SEEKING; NORTH SEEKING CAPABLE MEMS GYROSCOPE; SEALED CAVITIES; SHOCK AND VIBRATION; SPI INTERFACES; TEMPERATURE EFFECTS; VIBRATING ELEMENTS;

CRYSTALLINE MATERIALS; NAVIGATION; OPTIMIZATION; STABILITY; VIBRATIONS (MECHANICAL);

GYROSCOPES;

EID: 77955048591     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PLANS.2010.5507139     Document Type: Conference Paper

References (17)

1. "MEMS Accelerometer, Gyroscope and IMU market 2008-2013", Yole Développement, 2009.
2. N. Hedenstierna, S. Habibi, S. M. Nilsen, T. Kvisterøy, and G. U. Jensen, "Bulk micromachined angular rate sensor based on the 'butterfly'-gyro structure," MEMS 2001, pp. 178-181, 2001.
3. B. Chaumet, B. Leverrier, C. Rougeot, and S. Bouyat, "A new silicon tuning fork gyroscope for aerospace applications," Syposium Gyro Technology 2009, Karlsruhe, Sep. 2009.
4. A. A. Trusov, A. R. Schofield, and A. M. Shkel, "Vacuum packaged silicon MEMS gyroscope with Q-factor above 0.5 million," IMAPS Device Packaging 2010, March 2010.
5. G. Anderson, N. Hedenstierna, and P. Svensson, "An arrangement for measuring angular velocity," European Patent No. EP 1467179 A2, Autoliv Development AB, Oct. 2004.
6. A. Blomqvist, "Oscillating micro-mechanical sensor of angular velocity," US Patent No. US 7325451 B2, VTI Technologies Oy, Feb. 2008.
7. A. Blomqvist, "Oscillating micro-mechanical sensor of angular velocity," US Patent No. US 7454971 B2, VTI Technologies Oy, Nov. 2008.
8. D. Lapadatu, T. Kvisterøy, and H. Jakobsen, "Micromechanical Device," US Patent No. US 6684699 B1, Sensonor asa, Feb. 2004.
9. D. Lapadatu, G. Kittilsland, S. Jacobsen, "Method for manufacturing a hermetically sealed structure," Patent application, Sensonor Technologies AS, Apr. 2010.
10. H.-J. Quentzer, A. V. Schultz, and P. Merz, "Glass-type planar substrate, use thereof, and method for the production thereof," International Patent No. WO 2004/030057 A1, Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Apr. 2004.
11. H.-J. Quentzer, A. V. Schultz, B. Wagner, and P. Merz, "Method of structuring a flat substrate consisting of a glass-type material," US Patent No. US 2004/018051 A1, Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Sep. 2004.
12. R. N. Candler, A. Duwel, M. Varghese, S. A. Chandorkar, M. A. Hopcroft, W.-T. Park, K. Bongsang, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, "Impact of geometry on thermoelastic dissipation in micromechanical resonant beams," JMEMS, Vol 15, No 4, pp. 927-934, Aug. 2006.
13. A.-M. Kärkkäinen, "MEMS based voltage references," VTT Publications 613, 2006.
14. J. Wibbeler, G. Pfeifer, and M. Hietschold, "Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)," Sensors and Actuators A, Vol. 71, pp. 74-80, 1998.
15. A. H Nayfeh and M. I. Younis, "Dynamics of MEMS resonators under superharmonic and subharmonic excitations," J. Micromech. Microeng., Vol. 15, pp. 1840-1847, 2005.
16. L. A. Oropeza-Ramos and K. L. Turner, "Parametric Resonance Amplification in a MEMGyroscope," IEEE Sensors 2005., Nov. 2005.
17. B. J. Gallacher, J. S. Burdess, and K. M. Harish, "A control scheme for a MEMS electrostatic resonant gyroscope excited using combined parametric excitation and harmonic forcing," J. Micromech. Microeng., Vol. 16, pp. 320-331, 2006.