Bulk micromachined angular rate sensor based on the 'butterfly'-gyro structure

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 178-181

  Hedenstierna, Nils ^a   Habibi, Soheil ^a   Nilsen, Svein M ^a   Kvisterøy, Terje ^a   Jensen, Geir U ^b  

^a SensoNor   (Norway)

^b SINTEF   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; APPLICATION SPECIFIC INTEGRATED CIRCUITS; BANDWIDTH; ETCHING; MICROMACHINING; SILICON;

ANGULAR RATE SENSORS; BUTTERFLY-GYRO STRUCTURE;

SENSORS;

EID: 0035019314     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906509     Document Type: Article

References (0)