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Applied Physics A: Materials Science and Processing

Volumn 99, Issue 4, 2010, Pages 879-888

Study of intermixing and Zr-silicide formation using swift heavy ion irradiation

(6) Agarwal, Garima a Kulshrestha, Vaibhav a Dhunna, Renu a Kabiraj, D b Verma, Shikha c Jain, I P a

a UNIVERSITY OF RAJASTHAN (India)

b INTER UNIVERSITY ACCELERATOR CENTRE (India)

c INSTITUTE OF PHYSICS (India)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT CONDUCTION MECHANISMS; ELECTRONIC ENERGY LOSS; FLUENCES; HIGH-ENERGY IONS; I - V CURVE; INTERFACE MIXING; ION FLUENCES; ION IRRADIATION; ION TRACK; IRRADIATION EFFECT; MIXING EFFECTS; MOLTEN ZONES; SCHOTTKY BARRIER HEIGHTS; SI SUBSTRATES; SILICIDE FORMATION; STRUCTURAL MODIFICATIONS; SWIFT HEAVY ION IRRADIATION; SWIFT HEAVY IONS; THERMAL SPIKE MODEL; THIN FILM INTERFACES;

ATOMIC FORCE MICROSCOPY; CHEMICAL MODIFICATION; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; HEAVY IONS; IRRADIATION; MIXING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCHOTTKY BARRIER DIODES; SILICIDES; SURFACE ROUGHNESS; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; ZIRCONIUM;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77954887186 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-010-5631-2 Document Type: Article

Times cited : (12)

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