Aluminum-enhanced sharpening of silicon nanocones

Applied Physics A: Materials Science and Processing

Volumn 99, Issue 4, 2010, Pages 705-709

  Wang, Yewu ^a   Bauer, Jan ^a   Senz, Stephan ^a   Breitenstein, Otwin ^a   Gösele, Ulrich ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST PARTICLES; DRY OXIDATION; ETCHING TREATMENT; FIELD EMITTER; FIELD-EMISSION CHARACTERISTICS; HIGH COSTS; HIGH EMISSION CURRENT DENSITY; HIGH-DENSITY; NANO-CONES; OXIDATION BEHAVIORS; POTENTIAL APPLICATIONS; SHARP TIP; SI NANOCONES; SI NANOWIRE;

FIELD EMISSION; NANOTIPS; OXIDATION;

SILICON;

EID: 77954887021     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-010-5751-8     Document Type: Article

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