Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 425-427

  Lee, Sanjo ^a,b   Ju, Byeong Kwon ^a   Lee, Yun Hi ^a   Jeon, D ^b   Oh, Myung Hwan ^a  

^a Korea Institute of Technology Research Center Cheongryang   (South Korea)

^b Myong Ji University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009356138     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589330     Document Type: Article

References (5)

1. J. Liu, V. V. Zhirnov, G. J. Wojak, A. F. Myers, W. B. Choi, J. J. Hren, S. D. Wolter, M. T. McClure, B. R. Stoner, and J. T. Glass, Appl. Phys. Lett. 65, 2842 (1994); J. E. Jaskie, Mater. Res. Soc. Bull. March, 59 (1996); B. Chung, S. Lee, D. Jeon, K. R. Lee, and C. E. Yun (unpublished).
2. J. Liu, V. V. Zhirnov, G. J. Wojak, A. F. Myers, W. B. Choi, J. J. Hren, S. D. Wolter, M. T. McClure, B. R. Stoner, and J. T. Glass, Appl. Phys. Lett. 65, 2842 (1994); J. E. Jaskie, Mater. Res. Soc. Bull. March, 59 (1996); B. Chung, S. Lee, D. Jeon, K. R. Lee, and C. E. Yun (unpublished).
3. J. Liu, V. V. Zhirnov, G. J. Wojak, A. F. Myers, W. B. Choi, J. J. Hren, S. D. Wolter, M. T. McClure, B. R. Stoner, and J. T. Glass, Appl. Phys. Lett. 65, 2842 (1994); J. E. Jaskie, Mater. Res. Soc. Bull. March, 59 (1996); B. Chung, S. Lee, D. Jeon, K. R. Lee, and C. E. Yun (unpublished).
4. Z.-H. Huang, P. H. Cutler, N. M. Miskovsky, and T. E. Sullivan, Appl. Phys. Lett. 65, 2562 (1994).
5. Z.-H. Huang, M. S. Chung, P. H. Cutler, N. M. Miskovsky, and T. E. Sullivan, Appl. Phys. Lett. 67, 1235 (1995).