The microstructure of polymer-derived amorphous silicon carbide layers

Journal of the European Ceramic Society

Volumn 25, Issue 2-3 SPEC. ISS., 2005, Pages 151-156

  Hilbig, A ^a   Muller E ^a   Wenzel, R ^a   Roewer, G ^a   Brendler, E ^a   Irmer, G ^a   Schreiber, G ^a  

^a TU BERGAKADEMIE FREIBERG   (Germany)

Author keywords

Amorphous; Polymeric route; Silicon carbide

Indexed keywords

ARGON; CONCENTRATION (PROCESS); HYDROGEN; MICROSTRUCTURE; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PHASE TRANSITIONS; PYROLYSIS; RAMAN SPECTROSCOPY; SILANES; SILICON CARBIDE; SPIN COATING; STOICHIOMETRY; X RAY DIFFRACTION;

BULK MATERIALS; CRYSTALLITES; LIQUID CHLOROVINYLSILANES; POLYMER-DERIVED AMORPHOUS SILICON CARBIDE LAYERS;

AMORPHOUS SILICON;

MICROSTRUCTURE;

EID: 7544232379     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2004.07.011     Document Type: Article

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